JPS5128514B2 - - Google Patents

Info

Publication number
JPS5128514B2
JPS5128514B2 JP697172A JP697172A JPS5128514B2 JP S5128514 B2 JPS5128514 B2 JP S5128514B2 JP 697172 A JP697172 A JP 697172A JP 697172 A JP697172 A JP 697172A JP S5128514 B2 JPS5128514 B2 JP S5128514B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP697172A
Other languages
Japanese (ja)
Other versions
JPS4877773A (US07935154-20110503-C00006.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP697172A priority Critical patent/JPS5128514B2/ja
Publication of JPS4877773A publication Critical patent/JPS4877773A/ja
Publication of JPS5128514B2 publication Critical patent/JPS5128514B2/ja
Expired legal-status Critical Current

Links

JP697172A 1972-01-19 1972-01-19 Expired JPS5128514B2 (US07935154-20110503-C00006.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP697172A JPS5128514B2 (US07935154-20110503-C00006.png) 1972-01-19 1972-01-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP697172A JPS5128514B2 (US07935154-20110503-C00006.png) 1972-01-19 1972-01-19

Publications (2)

Publication Number Publication Date
JPS4877773A JPS4877773A (US07935154-20110503-C00006.png) 1973-10-19
JPS5128514B2 true JPS5128514B2 (US07935154-20110503-C00006.png) 1976-08-19

Family

ID=11653073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP697172A Expired JPS5128514B2 (US07935154-20110503-C00006.png) 1972-01-19 1972-01-19

Country Status (1)

Country Link
JP (1) JPS5128514B2 (US07935154-20110503-C00006.png)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5146077A (ja) * 1974-10-18 1976-04-20 Hitachi Ltd Handotaisochi
JPS5335481A (en) * 1976-09-14 1978-04-01 Mitsubishi Electric Corp Production of insulating gate type field effect transistor
JPS6011817B2 (ja) * 1977-11-24 1985-03-28 松下電器産業株式会社 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS4877773A (US07935154-20110503-C00006.png) 1973-10-19

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