JPS5128492Y2 - - Google Patents
Info
- Publication number
- JPS5128492Y2 JPS5128492Y2 JP10495372U JP10495372U JPS5128492Y2 JP S5128492 Y2 JPS5128492 Y2 JP S5128492Y2 JP 10495372 U JP10495372 U JP 10495372U JP 10495372 U JP10495372 U JP 10495372U JP S5128492 Y2 JPS5128492 Y2 JP S5128492Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Separation Of Gases By Adsorption (AREA)
- Filtering Materials (AREA)
- Gas Separation By Absorption (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10495372U JPS5128492Y2 (nl) | 1972-09-08 | 1972-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10495372U JPS5128492Y2 (nl) | 1972-09-08 | 1972-09-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4958910U JPS4958910U (nl) | 1974-05-24 |
| JPS5128492Y2 true JPS5128492Y2 (nl) | 1976-07-19 |
Family
ID=28318250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10495372U Expired JPS5128492Y2 (nl) | 1972-09-08 | 1972-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5128492Y2 (nl) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2747929B2 (ja) * | 1989-09-20 | 1998-05-06 | 東京エレクトロン株式会社 | アッシング装置 |
| JP7082924B2 (ja) * | 2018-08-21 | 2022-06-09 | 株式会社荏原製作所 | フッ素化合物除去装置、酸素除去装置 |
-
1972
- 1972-09-08 JP JP10495372U patent/JPS5128492Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4958910U (nl) | 1974-05-24 |