JPS5128209B2 - - Google Patents

Info

Publication number
JPS5128209B2
JPS5128209B2 JP46070715A JP7071571A JPS5128209B2 JP S5128209 B2 JPS5128209 B2 JP S5128209B2 JP 46070715 A JP46070715 A JP 46070715A JP 7071571 A JP7071571 A JP 7071571A JP S5128209 B2 JPS5128209 B2 JP S5128209B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP46070715A
Other languages
Japanese (ja)
Other versions
JPS4837107A (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP46070715A priority Critical patent/JPS5128209B2/ja
Publication of JPS4837107A publication Critical patent/JPS4837107A/ja
Publication of JPS5128209B2 publication Critical patent/JPS5128209B2/ja
Expired legal-status Critical Current

Links

JP46070715A 1971-09-10 1971-09-10 Expired JPS5128209B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP46070715A JPS5128209B2 (cs) 1971-09-10 1971-09-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP46070715A JPS5128209B2 (cs) 1971-09-10 1971-09-10

Publications (2)

Publication Number Publication Date
JPS4837107A JPS4837107A (cs) 1973-06-01
JPS5128209B2 true JPS5128209B2 (cs) 1976-08-18

Family

ID=13439530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46070715A Expired JPS5128209B2 (cs) 1971-09-10 1971-09-10

Country Status (1)

Country Link
JP (1) JPS5128209B2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53164305U (cs) * 1977-05-31 1978-12-22

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5736430A (ja) * 1980-08-15 1982-02-27 Hitachi Ltd Kaitenhetsudodoramuteepusokoannaitai
JPS58153116A (ja) * 1982-03-08 1983-09-12 Nippon Kogaku Kk <Nikon> 計測装置
JPS59202021A (ja) * 1983-04-30 1984-11-15 Ono Sokki Co Ltd 光電式位相変調型変位検出器
JPS6038617A (ja) * 1983-08-11 1985-02-28 Ono Sokki Co Ltd 光電式角度測定装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS449945Y1 (cs) * 1966-07-26 1969-04-22

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53164305U (cs) * 1977-05-31 1978-12-22

Also Published As

Publication number Publication date
JPS4837107A (cs) 1973-06-01

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