JPS5128189B1 - - Google Patents
Info
- Publication number
- JPS5128189B1 JPS5128189B1 JP45090150A JP9015070A JPS5128189B1 JP S5128189 B1 JPS5128189 B1 JP S5128189B1 JP 45090150 A JP45090150 A JP 45090150A JP 9015070 A JP9015070 A JP 9015070A JP S5128189 B1 JPS5128189 B1 JP S5128189B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Projection-Type Copiers In General (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL6915794A NL6915794A (en) | 1969-10-18 | 1969-10-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5128189B1 true JPS5128189B1 (en) | 1976-08-17 |
Family
ID=19808166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP45090150A Pending JPS5128189B1 (en) | 1969-10-18 | 1970-10-15 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US3688655A (en) |
| JP (1) | JPS5128189B1 (en) |
| AT (1) | AT307068B (en) |
| BE (1) | BE757658A (en) |
| CH (1) | CH515529A (en) |
| ES (1) | ES384612A1 (en) |
| FR (1) | FR2066104A5 (en) |
| GB (1) | GB1330343A (en) |
| NL (1) | NL6915794A (en) |
| SE (1) | SE354526B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3710702A (en) * | 1971-06-01 | 1973-01-16 | Ibm | Optical exposure head |
| US3848520A (en) * | 1972-07-24 | 1974-11-19 | Gerber Scientific Instr Co | Line drawing photoexposure device with image rotating means |
| US3836916A (en) * | 1973-02-26 | 1974-09-17 | Ibm | Apparatus for exposing lines on a photosensitive surface |
| US3975705A (en) * | 1974-02-11 | 1976-08-17 | Seiscom Delta Inc. | Color display of geophysical and other data |
| US4070187A (en) * | 1974-02-11 | 1978-01-24 | Seiscom Delta Inc. | Color display of data |
| US4573779A (en) * | 1983-12-30 | 1986-03-04 | International Business Machines Corporation | Variable size circular aperture camera |
| WO2009124595A1 (en) | 2008-04-11 | 2009-10-15 | Carl Zeiss Smt Ag | Optical aperture device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1107981A (en) * | 1963-06-06 | 1968-03-27 | Barr & Stroud Ltd | Apparatus for automatically drawing lines |
| US3330182A (en) * | 1965-10-01 | 1967-07-11 | Gerber Scientific Instr Co | Device for exposing discrete portions of a photosensitive surface to a variable intensity light beam |
-
0
- BE BE757658D patent/BE757658A/en unknown
-
1969
- 1969-10-18 NL NL6915794A patent/NL6915794A/xx unknown
-
1970
- 1970-10-15 CH CH1526170A patent/CH515529A/en not_active IP Right Cessation
- 1970-10-15 JP JP45090150A patent/JPS5128189B1/ja active Pending
- 1970-10-15 SE SE13934/70A patent/SE354526B/xx unknown
- 1970-10-15 GB GB4902970A patent/GB1330343A/en not_active Expired
- 1970-10-15 AT AT931470A patent/AT307068B/en not_active IP Right Cessation
- 1970-10-16 FR FR7037469A patent/FR2066104A5/fr not_active Expired
- 1970-10-16 ES ES384612A patent/ES384612A1/en not_active Expired
- 1970-10-16 US US81276A patent/US3688655A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE2050422B2 (en) | 1976-04-22 |
| FR2066104A5 (en) | 1971-08-06 |
| CH515529A (en) | 1971-11-15 |
| NL6915794A (en) | 1971-04-20 |
| GB1330343A (en) | 1973-09-19 |
| ES384612A1 (en) | 1973-01-16 |
| US3688655A (en) | 1972-09-05 |
| BE757658A (en) | 1971-04-16 |
| SE354526B (en) | 1973-03-12 |
| AT307068B (en) | 1973-05-10 |
| DE2050422A1 (en) | 1971-04-29 |