JPS5127825A - Himakukeiseisochi - Google Patents

Himakukeiseisochi

Info

Publication number
JPS5127825A
JPS5127825A JP9986574A JP9986574A JPS5127825A JP S5127825 A JPS5127825 A JP S5127825A JP 9986574 A JP9986574 A JP 9986574A JP 9986574 A JP9986574 A JP 9986574A JP S5127825 A JPS5127825 A JP S5127825A
Authority
JP
Japan
Prior art keywords
himakukeiseisochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9986574A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5318330B2 (cs
Inventor
Chikara Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP9986574A priority Critical patent/JPS5127825A/ja
Publication of JPS5127825A publication Critical patent/JPS5127825A/ja
Publication of JPS5318330B2 publication Critical patent/JPS5318330B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9986574A 1974-09-02 1974-09-02 Himakukeiseisochi Granted JPS5127825A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9986574A JPS5127825A (ja) 1974-09-02 1974-09-02 Himakukeiseisochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9986574A JPS5127825A (ja) 1974-09-02 1974-09-02 Himakukeiseisochi

Publications (2)

Publication Number Publication Date
JPS5127825A true JPS5127825A (ja) 1976-03-09
JPS5318330B2 JPS5318330B2 (cs) 1978-06-14

Family

ID=14258687

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9986574A Granted JPS5127825A (ja) 1974-09-02 1974-09-02 Himakukeiseisochi

Country Status (1)

Country Link
JP (1) JPS5127825A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55102178U (cs) * 1979-01-11 1980-07-16
JPH0244104U (cs) * 1988-09-21 1990-03-27

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4879736A (cs) * 1972-01-27 1973-10-25
JPS4927489A (cs) * 1972-07-06 1974-03-11

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4879736A (cs) * 1972-01-27 1973-10-25
JPS4927489A (cs) * 1972-07-06 1974-03-11

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55102178U (cs) * 1979-01-11 1980-07-16
JPH0244104U (cs) * 1988-09-21 1990-03-27

Also Published As

Publication number Publication date
JPS5318330B2 (cs) 1978-06-14

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