JPS4927489A - - Google Patents

Info

Publication number
JPS4927489A
JPS4927489A JP6777572A JP6777572A JPS4927489A JP S4927489 A JPS4927489 A JP S4927489A JP 6777572 A JP6777572 A JP 6777572A JP 6777572 A JP6777572 A JP 6777572A JP S4927489 A JPS4927489 A JP S4927489A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6777572A
Other languages
Japanese (ja)
Other versions
JPS5144705B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6777572A priority Critical patent/JPS5144705B2/ja
Publication of JPS4927489A publication Critical patent/JPS4927489A/ja
Publication of JPS5144705B2 publication Critical patent/JPS5144705B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6777572A 1972-07-06 1972-07-06 Expired JPS5144705B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6777572A JPS5144705B2 (cs) 1972-07-06 1972-07-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6777572A JPS5144705B2 (cs) 1972-07-06 1972-07-06

Publications (2)

Publication Number Publication Date
JPS4927489A true JPS4927489A (cs) 1974-03-11
JPS5144705B2 JPS5144705B2 (cs) 1976-11-30

Family

ID=13354647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6777572A Expired JPS5144705B2 (cs) 1972-07-06 1972-07-06

Country Status (1)

Country Link
JP (1) JPS5144705B2 (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4989642A (cs) * 1972-12-27 1974-08-27
JPS5127825A (ja) * 1974-09-02 1976-03-09 Ulvac Corp Himakukeiseisochi
JPS527820U (cs) * 1975-07-02 1977-01-20

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4989642A (cs) * 1972-12-27 1974-08-27
JPS5127825A (ja) * 1974-09-02 1976-03-09 Ulvac Corp Himakukeiseisochi
JPS527820U (cs) * 1975-07-02 1977-01-20

Also Published As

Publication number Publication date
JPS5144705B2 (cs) 1976-11-30

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