JPS5123896A - Usuitazaino shiagekakohoho - Google Patents

Usuitazaino shiagekakohoho

Info

Publication number
JPS5123896A
JPS5123896A JP49095047A JP9504774A JPS5123896A JP S5123896 A JPS5123896 A JP S5123896A JP 49095047 A JP49095047 A JP 49095047A JP 9504774 A JP9504774 A JP 9504774A JP S5123896 A JPS5123896 A JP S5123896A
Authority
JP
Japan
Prior art keywords
usuitazaino
shiagekakohoho
usuitazaino shiagekakohoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49095047A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5725344B2 (enExample
Inventor
Tsuneo Ehisa
Takao Nakamura
Noryoshi Arakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HITACHI ELECTRONICS
Original Assignee
HITACHI ELECTRONICS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HITACHI ELECTRONICS filed Critical HITACHI ELECTRONICS
Priority to JP49095047A priority Critical patent/JPS5123896A/ja
Publication of JPS5123896A publication Critical patent/JPS5123896A/ja
Publication of JPS5725344B2 publication Critical patent/JPS5725344B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
JP49095047A 1974-08-21 1974-08-21 Usuitazaino shiagekakohoho Granted JPS5123896A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49095047A JPS5123896A (en) 1974-08-21 1974-08-21 Usuitazaino shiagekakohoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49095047A JPS5123896A (en) 1974-08-21 1974-08-21 Usuitazaino shiagekakohoho

Publications (2)

Publication Number Publication Date
JPS5123896A true JPS5123896A (en) 1976-02-26
JPS5725344B2 JPS5725344B2 (enExample) 1982-05-28

Family

ID=14127139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49095047A Granted JPS5123896A (en) 1974-08-21 1974-08-21 Usuitazaino shiagekakohoho

Country Status (1)

Country Link
JP (1) JPS5123896A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5537229A (en) * 1978-09-01 1980-03-15 Chiyou Lsi Gijutsu Kenkyu Kumiai Lapping method of wafer
JPS5615973A (en) * 1979-07-13 1981-02-16 Fujitsu Ltd Machining method for both faces of tiny thin leaf
JPS5621747A (en) * 1979-07-20 1981-02-28 Hitachi Seiko Ltd Machining device for thin plate
JPS58132458A (ja) * 1982-01-25 1983-08-06 Hoya Corp 硬脆材料基板の平面研磨方法及び研磨装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5537229A (en) * 1978-09-01 1980-03-15 Chiyou Lsi Gijutsu Kenkyu Kumiai Lapping method of wafer
JPS5615973A (en) * 1979-07-13 1981-02-16 Fujitsu Ltd Machining method for both faces of tiny thin leaf
JPS5621747A (en) * 1979-07-20 1981-02-28 Hitachi Seiko Ltd Machining device for thin plate
JPS58132458A (ja) * 1982-01-25 1983-08-06 Hoya Corp 硬脆材料基板の平面研磨方法及び研磨装置

Also Published As

Publication number Publication date
JPS5725344B2 (enExample) 1982-05-28

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