JPS5123376B2 - - Google Patents
Info
- Publication number
- JPS5123376B2 JPS5123376B2 JP10320572A JP10320572A JPS5123376B2 JP S5123376 B2 JPS5123376 B2 JP S5123376B2 JP 10320572 A JP10320572 A JP 10320572A JP 10320572 A JP10320572 A JP 10320572A JP S5123376 B2 JPS5123376 B2 JP S5123376B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10320572A JPS5123376B2 (en:Method) | 1972-10-17 | 1972-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10320572A JPS5123376B2 (en:Method) | 1972-10-17 | 1972-10-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4961031A JPS4961031A (en:Method) | 1974-06-13 |
| JPS5123376B2 true JPS5123376B2 (en:Method) | 1976-07-16 |
Family
ID=14348002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10320572A Expired JPS5123376B2 (en:Method) | 1972-10-17 | 1972-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5123376B2 (en:Method) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50133176A (en:Method) * | 1974-04-09 | 1975-10-22 | ||
| JPS50159477A (en:Method) * | 1974-06-14 | 1975-12-24 | ||
| JPS50161476A (en:Method) * | 1974-06-20 | 1975-12-27 | ||
| JPS50161477A (en:Method) * | 1974-06-20 | 1975-12-27 | ||
| JPS5137084A (ja) * | 1974-09-25 | 1976-03-29 | Suwa Seikosha Kk | Koshuhaionpureeteingu |
| JPS51101735A (ja) * | 1975-03-06 | 1976-09-08 | Sumitomo Bakelite Co | Kinzokuhakumakuhifukunetsukasoseijushifuirumunoseizohoho |
| JPS51106641A (ja) * | 1975-03-17 | 1976-09-21 | Matsushita Electric Ind Co Ltd | Ionpureeteingusochi |
| JPS589156B2 (ja) * | 1975-03-28 | 1983-02-19 | 松下電器産業株式会社 | イオン化プレ−テイング装置 |
| JPS5533918U (en:Method) * | 1978-08-23 | 1980-03-05 | ||
| JPS5562567U (en:Method) * | 1978-10-20 | 1980-04-28 | ||
| JPS5591970A (en) * | 1978-12-28 | 1980-07-11 | Jeol Ltd | Ion plating device |
| JPS5681671A (en) * | 1979-12-04 | 1981-07-03 | Matsushita Electric Ind Co Ltd | Ion plating apparatus |
| JPS5739169A (en) * | 1980-08-19 | 1982-03-04 | Sekisui Chem Co Ltd | Preparation of thin film vapor deposited object |
| JPS58133370A (ja) * | 1982-02-01 | 1983-08-09 | Agency Of Ind Science & Technol | 物理蒸着における被処理物の放電処理方法 |
-
1972
- 1972-10-17 JP JP10320572A patent/JPS5123376B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4961031A (en:Method) | 1974-06-13 |