JPS5123376B2 - - Google Patents

Info

Publication number
JPS5123376B2
JPS5123376B2 JP10320572A JP10320572A JPS5123376B2 JP S5123376 B2 JPS5123376 B2 JP S5123376B2 JP 10320572 A JP10320572 A JP 10320572A JP 10320572 A JP10320572 A JP 10320572A JP S5123376 B2 JPS5123376 B2 JP S5123376B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10320572A
Other languages
Japanese (ja)
Other versions
JPS4961031A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10320572A priority Critical patent/JPS5123376B2/ja
Publication of JPS4961031A publication Critical patent/JPS4961031A/ja
Publication of JPS5123376B2 publication Critical patent/JPS5123376B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10320572A 1972-10-17 1972-10-17 Expired JPS5123376B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10320572A JPS5123376B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-10-17 1972-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10320572A JPS5123376B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-10-17 1972-10-17

Publications (2)

Publication Number Publication Date
JPS4961031A JPS4961031A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-06-13
JPS5123376B2 true JPS5123376B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-07-16

Family

ID=14348002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10320572A Expired JPS5123376B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-10-17 1972-10-17

Country Status (1)

Country Link
JP (1) JPS5123376B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50133176A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-04-09 1975-10-22
JPS50159477A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-06-14 1975-12-24
JPS50161477A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-06-20 1975-12-27
JPS50161476A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-06-20 1975-12-27
JPS5137084A (ja) * 1974-09-25 1976-03-29 Suwa Seikosha Kk Koshuhaionpureeteingu
JPS51101735A (ja) * 1975-03-06 1976-09-08 Sumitomo Bakelite Co Kinzokuhakumakuhifukunetsukasoseijushifuirumunoseizohoho
JPS51106641A (en) * 1975-03-17 1976-09-21 Matsushita Electric Industrial Co Ltd Ionpureeteingusochi
JPS589156B2 (ja) * 1975-03-28 1983-02-19 松下電器産業株式会社 イオン化プレ−テイング装置
JPS5533918U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1978-08-23 1980-03-05
JPS5562567U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1978-10-20 1980-04-28
JPS5591970A (en) * 1978-12-28 1980-07-11 Jeol Ltd Ion plating device
JPS5681671A (en) * 1979-12-04 1981-07-03 Matsushita Electric Ind Co Ltd Ion plating apparatus
JPS5739169A (en) * 1980-08-19 1982-03-04 Sekisui Chem Co Ltd Preparation of thin film vapor deposited object
JPS58133370A (ja) * 1982-02-01 1983-08-09 Agency Of Ind Science & Technol 物理蒸着における被処理物の放電処理方法

Also Published As

Publication number Publication date
JPS4961031A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-06-13

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