JPS5122754Y2 - - Google Patents

Info

Publication number
JPS5122754Y2
JPS5122754Y2 JP1972068830U JP6883072U JPS5122754Y2 JP S5122754 Y2 JPS5122754 Y2 JP S5122754Y2 JP 1972068830 U JP1972068830 U JP 1972068830U JP 6883072 U JP6883072 U JP 6883072U JP S5122754 Y2 JPS5122754 Y2 JP S5122754Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1972068830U
Other languages
Japanese (ja)
Other versions
JPS4925563U (ja�@�@
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1972068830U priority Critical patent/JPS5122754Y2/ja
Publication of JPS4925563U publication Critical patent/JPS4925563U/ja
Application granted granted Critical
Publication of JPS5122754Y2 publication Critical patent/JPS5122754Y2/ja
Expired legal-status Critical Current

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JP1972068830U 1972-06-05 1972-06-05 Expired JPS5122754Y2 (ja�@�@)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1972068830U JPS5122754Y2 (ja�@�@) 1972-06-05 1972-06-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1972068830U JPS5122754Y2 (ja�@�@) 1972-06-05 1972-06-05

Publications (2)

Publication Number Publication Date
JPS4925563U JPS4925563U (ja�@�@) 1974-03-05
JPS5122754Y2 true JPS5122754Y2 (ja�@�@) 1976-06-11

Family

ID=27964684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1972068830U Expired JPS5122754Y2 (ja�@�@) 1972-06-05 1972-06-05

Country Status (1)

Country Link
JP (1) JPS5122754Y2 (ja�@�@)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6255189U (ja�@�@) * 1985-09-25 1987-04-06
JPS63250138A (ja) * 1987-04-07 1988-10-18 Mitsubishi Electric Corp 半導体組立装置

Also Published As

Publication number Publication date
JPS4925563U (ja�@�@) 1974-03-05

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