JPS5121751B2 - - Google Patents

Info

Publication number
JPS5121751B2
JPS5121751B2 JP47002581A JP258172A JPS5121751B2 JP S5121751 B2 JPS5121751 B2 JP S5121751B2 JP 47002581 A JP47002581 A JP 47002581A JP 258172 A JP258172 A JP 258172A JP S5121751 B2 JPS5121751 B2 JP S5121751B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47002581A
Other languages
Japanese (ja)
Other versions
JPS4871191A (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47002581A priority Critical patent/JPS5121751B2/ja
Publication of JPS4871191A publication Critical patent/JPS4871191A/ja
Publication of JPS5121751B2 publication Critical patent/JPS5121751B2/ja
Expired legal-status Critical Current

Links

JP47002581A 1971-12-24 1971-12-24 Expired JPS5121751B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47002581A JPS5121751B2 (enExample) 1971-12-24 1971-12-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47002581A JPS5121751B2 (enExample) 1971-12-24 1971-12-24

Publications (2)

Publication Number Publication Date
JPS4871191A JPS4871191A (enExample) 1973-09-26
JPS5121751B2 true JPS5121751B2 (enExample) 1976-07-05

Family

ID=11533326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47002581A Expired JPS5121751B2 (enExample) 1971-12-24 1971-12-24

Country Status (1)

Country Link
JP (1) JPS5121751B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50154075A (enExample) * 1974-05-31 1975-12-11
JPS51129183A (en) * 1975-05-02 1976-11-10 Mitsubishi Electric Corp Manufacturing method of semiconductor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3475234A (en) * 1967-03-27 1969-10-28 Bell Telephone Labor Inc Method for making mis structures

Also Published As

Publication number Publication date
JPS4871191A (enExample) 1973-09-26

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