JPS5121751B2 - - Google Patents

Info

Publication number
JPS5121751B2
JPS5121751B2 JP47002581A JP258172A JPS5121751B2 JP S5121751 B2 JPS5121751 B2 JP S5121751B2 JP 47002581 A JP47002581 A JP 47002581A JP 258172 A JP258172 A JP 258172A JP S5121751 B2 JPS5121751 B2 JP S5121751B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47002581A
Other languages
Japanese (ja)
Other versions
JPS4871191A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47002581A priority Critical patent/JPS5121751B2/ja
Publication of JPS4871191A publication Critical patent/JPS4871191A/ja
Publication of JPS5121751B2 publication Critical patent/JPS5121751B2/ja
Expired legal-status Critical Current

Links

JP47002581A 1971-12-24 1971-12-24 Expired JPS5121751B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47002581A JPS5121751B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1971-12-24 1971-12-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47002581A JPS5121751B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1971-12-24 1971-12-24

Publications (2)

Publication Number Publication Date
JPS4871191A JPS4871191A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-09-26
JPS5121751B2 true JPS5121751B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-07-05

Family

ID=11533326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47002581A Expired JPS5121751B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1971-12-24 1971-12-24

Country Status (1)

Country Link
JP (1) JPS5121751B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50154075A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-05-31 1975-12-11
JPS51129183A (en) * 1975-05-02 1976-11-10 Mitsubishi Electric Corp Manufacturing method of semiconductor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3475234A (en) * 1967-03-27 1969-10-28 Bell Telephone Labor Inc Method for making mis structures

Also Published As

Publication number Publication date
JPS4871191A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-09-26

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