JPS512161U - - Google Patents
Info
- Publication number
- JPS512161U JPS512161U JP1974074073U JP7407374U JPS512161U JP S512161 U JPS512161 U JP S512161U JP 1974074073 U JP1974074073 U JP 1974074073U JP 7407374 U JP7407374 U JP 7407374U JP S512161 U JPS512161 U JP S512161U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
- C30B31/103—Mechanisms for moving either the charge or heater
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1974074073U JPS512161U ( ) | 1974-06-24 | 1974-06-24 | |
US05/586,807 US3998333A (en) | 1974-06-24 | 1975-06-13 | Carrier for processing semiconductor materials |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1974074073U JPS512161U ( ) | 1974-06-24 | 1974-06-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS512161U true JPS512161U ( ) | 1976-01-09 |
Family
ID=13536626
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1974074073U Pending JPS512161U ( ) | 1974-06-24 | 1974-06-24 |
Country Status (2)
Country | Link |
---|---|
US (1) | US3998333A ( ) |
JP (1) | JPS512161U ( ) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0193195U ( ) * | 1987-12-14 | 1989-06-19 |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5245874A (en) * | 1975-10-09 | 1977-04-11 | Nippon Denso Co Ltd | Transfer device of semiconductor substrate holding device |
JPS5277590A (en) * | 1975-12-24 | 1977-06-30 | Toshiba Corp | Semiconductor producing device |
US4053294A (en) * | 1976-05-19 | 1977-10-11 | California Quartzware Corporation | Low stress semiconductor wafer carrier and method of manufacture |
US4088254A (en) * | 1976-12-08 | 1978-05-09 | Hooper Joel Ray | Magnetic holding apparatus and methods of constructing and utilizing same |
US4256053A (en) * | 1979-08-17 | 1981-03-17 | Dozier Alfred R | Chemical vapor reaction system |
US4287851A (en) * | 1980-01-16 | 1981-09-08 | Dozier Alfred R | Mounting and excitation system for reaction in the plasma state |
US4355974A (en) * | 1980-11-24 | 1982-10-26 | Asq Boats, Inc. | Wafer boat |
USRE33341E (en) * | 1983-05-23 | 1990-09-18 | ASQ Technology, Inc. | Wafer transfer apparatus |
US4738272A (en) * | 1984-05-21 | 1988-04-19 | Mcconnell Christopher F | Vessel and system for treating wafers with fluids |
US4577650A (en) * | 1984-05-21 | 1986-03-25 | Mcconnell Christopher F | Vessel and system for treating wafers with fluids |
US4856544A (en) * | 1984-05-21 | 1989-08-15 | Cfm Technologies, Inc. | Vessel and system for treating wafers with fluids |
US4740249A (en) * | 1984-05-21 | 1988-04-26 | Christopher F. McConnell | Method of treating wafers with fluid |
US4633893A (en) * | 1984-05-21 | 1987-01-06 | Cfm Technologies Limited Partnership | Apparatus for treating semiconductor wafers |
US4653636A (en) * | 1985-05-14 | 1987-03-31 | Microglass, Inc. | Wafer carrier and method |
US4728246A (en) * | 1986-05-16 | 1988-03-01 | Thermco Systems, Inc. | Wafer boat transfer tool |
US5030057A (en) * | 1987-11-06 | 1991-07-09 | Tel Sagami Limited | Semiconductor wafer transferring method and apparatus and boat for thermal treatment of a semiconductor wafer |
EP0894542B1 (en) * | 1991-10-04 | 2004-01-21 | Cfmt, Inc. | Ultracleaning of involuted microparts |
JP2001000934A (ja) * | 1999-06-18 | 2001-01-09 | Fujitsu Ltd | ローバー剥がし洗浄治具およびローバー剥がし洗浄方法 |
JP4467028B2 (ja) * | 2001-05-11 | 2010-05-26 | 信越石英株式会社 | 縦型ウェーハ支持治具 |
US20040188319A1 (en) * | 2003-03-28 | 2004-09-30 | Saint-Gobain Ceramics & Plastics, Inc. | Wafer carrier having improved processing characteristics |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3819067A (en) * | 1972-08-29 | 1974-06-25 | I Hammond | Heat treating apparatus |
US3949891A (en) * | 1974-07-22 | 1976-04-13 | Micro Glass Inc. | Semiconductor wafer transfer device |
US3951587A (en) * | 1974-12-06 | 1976-04-20 | Norton Company | Silicon carbide diffusion furnace components |
-
1974
- 1974-06-24 JP JP1974074073U patent/JPS512161U/ja active Pending
-
1975
- 1975-06-13 US US05/586,807 patent/US3998333A/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0193195U ( ) * | 1987-12-14 | 1989-06-19 |
Also Published As
Publication number | Publication date |
---|---|
US3998333A (en) | 1976-12-21 |