JPS5120393B2 - - Google Patents

Info

Publication number
JPS5120393B2
JPS5120393B2 JP47114420A JP11442072A JPS5120393B2 JP S5120393 B2 JPS5120393 B2 JP S5120393B2 JP 47114420 A JP47114420 A JP 47114420A JP 11442072 A JP11442072 A JP 11442072A JP S5120393 B2 JPS5120393 B2 JP S5120393B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47114420A
Other languages
Japanese (ja)
Other versions
JPS4973385A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47114420A priority Critical patent/JPS5120393B2/ja
Publication of JPS4973385A publication Critical patent/JPS4973385A/ja
Publication of JPS5120393B2 publication Critical patent/JPS5120393B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP47114420A 1972-11-15 1972-11-15 Expired JPS5120393B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47114420A JPS5120393B2 (enrdf_load_stackoverflow) 1972-11-15 1972-11-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47114420A JPS5120393B2 (enrdf_load_stackoverflow) 1972-11-15 1972-11-15

Publications (2)

Publication Number Publication Date
JPS4973385A JPS4973385A (enrdf_load_stackoverflow) 1974-07-16
JPS5120393B2 true JPS5120393B2 (enrdf_load_stackoverflow) 1976-06-24

Family

ID=14637249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47114420A Expired JPS5120393B2 (enrdf_load_stackoverflow) 1972-11-15 1972-11-15

Country Status (1)

Country Link
JP (1) JPS5120393B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS531140A (en) * 1976-06-25 1978-01-07 Ulvac Corp Method of coating inner surface of tube using energy source for heating
JPS5331581A (en) * 1976-09-07 1978-03-24 Ulvac Corp Coating method of tube inside by ion beam
JPS6283464A (ja) * 1985-10-04 1987-04-16 Sumitomo Electric Ind Ltd 筒状部材内面被覆方法および装置
JP4684414B2 (ja) * 2000-12-27 2011-05-18 株式会社アドバンテスト 蒸着装置、蒸着方法、電子ビーム露光装置、偏向装置及び偏向装置の製造方法

Also Published As

Publication number Publication date
JPS4973385A (enrdf_load_stackoverflow) 1974-07-16

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