JPS5120170B2 - - Google Patents
Info
- Publication number
- JPS5120170B2 JPS5120170B2 JP47009788A JP978872A JPS5120170B2 JP S5120170 B2 JPS5120170 B2 JP S5120170B2 JP 47009788 A JP47009788 A JP 47009788A JP 978872 A JP978872 A JP 978872A JP S5120170 B2 JPS5120170 B2 JP S5120170B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47009788A JPS5120170B2 (https=) | 1972-01-27 | 1972-01-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47009788A JPS5120170B2 (https=) | 1972-01-27 | 1972-01-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4879736A JPS4879736A (https=) | 1973-10-25 |
| JPS5120170B2 true JPS5120170B2 (https=) | 1976-06-23 |
Family
ID=11729947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47009788A Expired JPS5120170B2 (https=) | 1972-01-27 | 1972-01-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5120170B2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50159477A (https=) * | 1974-06-14 | 1975-12-24 | ||
| JPS5127826A (ja) * | 1974-09-02 | 1976-03-09 | Ulvac Corp | Himakukeiseisochi |
| JPS5127825A (ja) * | 1974-09-02 | 1976-03-09 | Ulvac Corp | Himakukeiseisochi |
| JPS5253778A (en) * | 1975-10-29 | 1977-04-30 | Yoichi Murayama | Ion plating apparatus |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3583361A (en) * | 1969-12-18 | 1971-06-08 | Atomic Energy Commission | Ion beam deposition system |
-
1972
- 1972-01-27 JP JP47009788A patent/JPS5120170B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4879736A (https=) | 1973-10-25 |