JPS5120170B2 - - Google Patents

Info

Publication number
JPS5120170B2
JPS5120170B2 JP47009788A JP978872A JPS5120170B2 JP S5120170 B2 JPS5120170 B2 JP S5120170B2 JP 47009788 A JP47009788 A JP 47009788A JP 978872 A JP978872 A JP 978872A JP S5120170 B2 JPS5120170 B2 JP S5120170B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47009788A
Other languages
Japanese (ja)
Other versions
JPS4879736A (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47009788A priority Critical patent/JPS5120170B2/ja
Publication of JPS4879736A publication Critical patent/JPS4879736A/ja
Publication of JPS5120170B2 publication Critical patent/JPS5120170B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP47009788A 1972-01-27 1972-01-27 Expired JPS5120170B2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47009788A JPS5120170B2 (cg-RX-API-DMAC10.html) 1972-01-27 1972-01-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47009788A JPS5120170B2 (cg-RX-API-DMAC10.html) 1972-01-27 1972-01-27

Publications (2)

Publication Number Publication Date
JPS4879736A JPS4879736A (cg-RX-API-DMAC10.html) 1973-10-25
JPS5120170B2 true JPS5120170B2 (cg-RX-API-DMAC10.html) 1976-06-23

Family

ID=11729947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47009788A Expired JPS5120170B2 (cg-RX-API-DMAC10.html) 1972-01-27 1972-01-27

Country Status (1)

Country Link
JP (1) JPS5120170B2 (cg-RX-API-DMAC10.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50159477A (cg-RX-API-DMAC10.html) * 1974-06-14 1975-12-24
JPS5127825A (ja) * 1974-09-02 1976-03-09 Ulvac Corp Himakukeiseisochi
JPS5127826A (ja) * 1974-09-02 1976-03-09 Ulvac Corp Himakukeiseisochi
JPS5253778A (en) * 1975-10-29 1977-04-30 Yoichi Murayama Ion plating apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3583361A (en) * 1969-12-18 1971-06-08 Atomic Energy Commission Ion beam deposition system

Also Published As

Publication number Publication date
JPS4879736A (cg-RX-API-DMAC10.html) 1973-10-25

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