JPS5120170B2 - - Google Patents

Info

Publication number
JPS5120170B2
JPS5120170B2 JP47009788A JP978872A JPS5120170B2 JP S5120170 B2 JPS5120170 B2 JP S5120170B2 JP 47009788 A JP47009788 A JP 47009788A JP 978872 A JP978872 A JP 978872A JP S5120170 B2 JPS5120170 B2 JP S5120170B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47009788A
Other languages
Japanese (ja)
Other versions
JPS4879736A (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47009788A priority Critical patent/JPS5120170B2/ja
Publication of JPS4879736A publication Critical patent/JPS4879736A/ja
Publication of JPS5120170B2 publication Critical patent/JPS5120170B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP47009788A 1972-01-27 1972-01-27 Expired JPS5120170B2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47009788A JPS5120170B2 (OSRAM) 1972-01-27 1972-01-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47009788A JPS5120170B2 (OSRAM) 1972-01-27 1972-01-27

Publications (2)

Publication Number Publication Date
JPS4879736A JPS4879736A (OSRAM) 1973-10-25
JPS5120170B2 true JPS5120170B2 (OSRAM) 1976-06-23

Family

ID=11729947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47009788A Expired JPS5120170B2 (OSRAM) 1972-01-27 1972-01-27

Country Status (1)

Country Link
JP (1) JPS5120170B2 (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50159477A (OSRAM) * 1974-06-14 1975-12-24
JPS5127825A (ja) * 1974-09-02 1976-03-09 Ulvac Corp Himakukeiseisochi
JPS5127826A (ja) * 1974-09-02 1976-03-09 Ulvac Corp Himakukeiseisochi
JPS5253778A (en) * 1975-10-29 1977-04-30 Yoichi Murayama Ion plating apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3583361A (en) * 1969-12-18 1971-06-08 Atomic Energy Commission Ion beam deposition system

Also Published As

Publication number Publication date
JPS4879736A (OSRAM) 1973-10-25

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