JPS5117813U - - Google Patents
Info
- Publication number
- JPS5117813U JPS5117813U JP8995574U JP8995574U JPS5117813U JP S5117813 U JPS5117813 U JP S5117813U JP 8995574 U JP8995574 U JP 8995574U JP 8995574 U JP8995574 U JP 8995574U JP S5117813 U JPS5117813 U JP S5117813U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8995574U JPS5117813U (en) | 1974-07-27 | 1974-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8995574U JPS5117813U (en) | 1974-07-27 | 1974-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5117813U true JPS5117813U (en) | 1976-02-09 |
Family
ID=28276762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8995574U Pending JPS5117813U (en) | 1974-07-27 | 1974-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5117813U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58123518A (en) * | 1982-01-19 | 1983-07-22 | Seiko Epson Corp | Rubbing device |
| JPS59151426A (en) * | 1983-01-21 | 1984-08-29 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | Device for photolithographically treating thin substrate |
| JPH0430553A (en) * | 1990-05-28 | 1992-02-03 | Dainippon Screen Mfg Co Ltd | Substrate aligning supporting device |
-
1974
- 1974-07-27 JP JP8995574U patent/JPS5117813U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58123518A (en) * | 1982-01-19 | 1983-07-22 | Seiko Epson Corp | Rubbing device |
| JPS59151426A (en) * | 1983-01-21 | 1984-08-29 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | Device for photolithographically treating thin substrate |
| JPH0434812B2 (en) * | 1983-01-21 | 1992-06-09 | Fuiritsupusu Furuuiranpenfuaburiken Nv | |
| JPH0430553A (en) * | 1990-05-28 | 1992-02-03 | Dainippon Screen Mfg Co Ltd | Substrate aligning supporting device |
| JP2552017B2 (en) * | 1990-05-28 | 1996-11-06 | 大日本スクリーン製造株式会社 | Substrate alignment support device |