JPS5117805U - - Google Patents

Info

Publication number
JPS5117805U
JPS5117805U JP9017174U JP9017174U JPS5117805U JP S5117805 U JPS5117805 U JP S5117805U JP 9017174 U JP9017174 U JP 9017174U JP 9017174 U JP9017174 U JP 9017174U JP S5117805 U JPS5117805 U JP S5117805U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9017174U
Other languages
Japanese (ja)
Other versions
JPS5516225Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1974090171U priority Critical patent/JPS5516225Y2/ja
Publication of JPS5117805U publication Critical patent/JPS5117805U/ja
Application granted granted Critical
Publication of JPS5516225Y2 publication Critical patent/JPS5516225Y2/ja
Expired legal-status Critical Current

Links

JP1974090171U 1974-07-29 1974-07-29 Expired JPS5516225Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974090171U JPS5516225Y2 (en) 1974-07-29 1974-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974090171U JPS5516225Y2 (en) 1974-07-29 1974-07-29

Publications (2)

Publication Number Publication Date
JPS5117805U true JPS5117805U (en) 1976-02-09
JPS5516225Y2 JPS5516225Y2 (en) 1980-04-15

Family

ID=28277245

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974090171U Expired JPS5516225Y2 (en) 1974-07-29 1974-07-29

Country Status (1)

Country Link
JP (1) JPS5516225Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5839048U (en) * 1981-09-08 1983-03-14 三菱電機株式会社 semiconductor equipment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4512290Y1 (en) * 1965-07-09 1970-05-29
JPS4870034U (en) * 1971-12-10 1973-09-04

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4512290Y1 (en) * 1965-07-09 1970-05-29
JPS4870034U (en) * 1971-12-10 1973-09-04

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5839048U (en) * 1981-09-08 1983-03-14 三菱電機株式会社 semiconductor equipment

Also Published As

Publication number Publication date
JPS5516225Y2 (en) 1980-04-15

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