JPS5117507B2 - - Google Patents
Info
- Publication number
- JPS5117507B2 JPS5117507B2 JP11523872A JP11523872A JPS5117507B2 JP S5117507 B2 JPS5117507 B2 JP S5117507B2 JP 11523872 A JP11523872 A JP 11523872A JP 11523872 A JP11523872 A JP 11523872A JP S5117507 B2 JPS5117507 B2 JP S5117507B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11523872A JPS5117507B2 (cs) | 1972-11-18 | 1972-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11523872A JPS5117507B2 (cs) | 1972-11-18 | 1972-11-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4974178A JPS4974178A (cs) | 1974-07-17 |
| JPS5117507B2 true JPS5117507B2 (cs) | 1976-06-02 |
Family
ID=14657749
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11523872A Expired JPS5117507B2 (cs) | 1972-11-18 | 1972-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5117507B2 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5286983A (en) * | 1976-01-16 | 1977-07-20 | Ulvac Corp | Ion plating apparatus |
-
1972
- 1972-11-18 JP JP11523872A patent/JPS5117507B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4974178A (cs) | 1974-07-17 |