JPS5117385B2 - - Google Patents
Info
- Publication number
- JPS5117385B2 JPS5117385B2 JP46077330A JP7733071A JPS5117385B2 JP S5117385 B2 JPS5117385 B2 JP S5117385B2 JP 46077330 A JP46077330 A JP 46077330A JP 7733071 A JP7733071 A JP 7733071A JP S5117385 B2 JPS5117385 B2 JP S5117385B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Relating To Insulation (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46077330A JPS5117385B2 (ja) | 1971-10-01 | 1971-10-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46077330A JPS5117385B2 (ja) | 1971-10-01 | 1971-10-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4843276A JPS4843276A (ja) | 1973-06-22 |
| JPS5117385B2 true JPS5117385B2 (ja) | 1976-06-02 |
Family
ID=13630905
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46077330A Expired JPS5117385B2 (ja) | 1971-10-01 | 1971-10-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5117385B2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2713734B2 (ja) * | 1988-06-17 | 1998-02-16 | 松下電器産業株式会社 | 基板用電子ビームテスタ |
-
1971
- 1971-10-01 JP JP46077330A patent/JPS5117385B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4843276A (ja) | 1973-06-22 |