JPS5117148B2 - - Google Patents

Info

Publication number
JPS5117148B2
JPS5117148B2 JP47067084A JP6708472A JPS5117148B2 JP S5117148 B2 JPS5117148 B2 JP S5117148B2 JP 47067084 A JP47067084 A JP 47067084A JP 6708472 A JP6708472 A JP 6708472A JP S5117148 B2 JPS5117148 B2 JP S5117148B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47067084A
Other languages
Japanese (ja)
Other versions
JPS4926183A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47067084A priority Critical patent/JPS5117148B2/ja
Publication of JPS4926183A publication Critical patent/JPS4926183A/ja
Publication of JPS5117148B2 publication Critical patent/JPS5117148B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP47067084A 1972-07-06 1972-07-06 Expired JPS5117148B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47067084A JPS5117148B2 (en:Method) 1972-07-06 1972-07-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47067084A JPS5117148B2 (en:Method) 1972-07-06 1972-07-06

Publications (2)

Publication Number Publication Date
JPS4926183A JPS4926183A (en:Method) 1974-03-08
JPS5117148B2 true JPS5117148B2 (en:Method) 1976-05-31

Family

ID=13334643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47067084A Expired JPS5117148B2 (en:Method) 1972-07-06 1972-07-06

Country Status (1)

Country Link
JP (1) JPS5117148B2 (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0681161A (ja) * 1992-08-31 1994-03-22 Hitachi Ltd 銅及び銅合金の表面処理剤

Also Published As

Publication number Publication date
JPS4926183A (en:Method) 1974-03-08

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