JPS5116371Y2 - - Google Patents
Info
- Publication number
- JPS5116371Y2 JPS5116371Y2 JP5692572U JP5692572U JPS5116371Y2 JP S5116371 Y2 JPS5116371 Y2 JP S5116371Y2 JP 5692572 U JP5692572 U JP 5692572U JP 5692572 U JP5692572 U JP 5692572U JP S5116371 Y2 JPS5116371 Y2 JP S5116371Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5692572U JPS5116371Y2 (en:Method) | 1972-05-16 | 1972-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5692572U JPS5116371Y2 (en:Method) | 1972-05-16 | 1972-05-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4915136U JPS4915136U (en:Method) | 1974-02-08 |
| JPS5116371Y2 true JPS5116371Y2 (en:Method) | 1976-04-30 |
Family
ID=27942441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5692572U Expired JPS5116371Y2 (en:Method) | 1972-05-16 | 1972-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5116371Y2 (en:Method) |
-
1972
- 1972-05-16 JP JP5692572U patent/JPS5116371Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4915136U (en:Method) | 1974-02-08 |