JPS4915136U - - Google Patents

Info

Publication number
JPS4915136U
JPS4915136U JP5692572U JP5692572U JPS4915136U JP S4915136 U JPS4915136 U JP S4915136U JP 5692572 U JP5692572 U JP 5692572U JP 5692572 U JP5692572 U JP 5692572U JP S4915136 U JPS4915136 U JP S4915136U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5692572U
Other languages
Japanese (ja)
Other versions
JPS5116371Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5692572U priority Critical patent/JPS5116371Y2/ja
Publication of JPS4915136U publication Critical patent/JPS4915136U/ja
Application granted granted Critical
Publication of JPS5116371Y2 publication Critical patent/JPS5116371Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP5692572U 1972-05-16 1972-05-16 Expired JPS5116371Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5692572U JPS5116371Y2 (en:Method) 1972-05-16 1972-05-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5692572U JPS5116371Y2 (en:Method) 1972-05-16 1972-05-16

Publications (2)

Publication Number Publication Date
JPS4915136U true JPS4915136U (en:Method) 1974-02-08
JPS5116371Y2 JPS5116371Y2 (en:Method) 1976-04-30

Family

ID=27942441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5692572U Expired JPS5116371Y2 (en:Method) 1972-05-16 1972-05-16

Country Status (1)

Country Link
JP (1) JPS5116371Y2 (en:Method)

Also Published As

Publication number Publication date
JPS5116371Y2 (en:Method) 1976-04-30

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