JPS51150873A - Cleaning head supporting apparatus - Google Patents
Cleaning head supporting apparatusInfo
- Publication number
- JPS51150873A JPS51150873A JP7495275A JP7495275A JPS51150873A JP S51150873 A JPS51150873 A JP S51150873A JP 7495275 A JP7495275 A JP 7495275A JP 7495275 A JP7495275 A JP 7495275A JP S51150873 A JPS51150873 A JP S51150873A
- Authority
- JP
- Japan
- Prior art keywords
- cleaning head
- supporting apparatus
- head supporting
- cleaned
- posture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To clean the surface to be cleaned safely and completely from the upper end and the lower end of the surface by changing the posture of a cleaning head at the beginning and at the end of the surface to be cleaned.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7495275A JPS51150873A (en) | 1975-06-18 | 1975-06-18 | Cleaning head supporting apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7495275A JPS51150873A (en) | 1975-06-18 | 1975-06-18 | Cleaning head supporting apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51150873A true JPS51150873A (en) | 1976-12-24 |
JPS5440864B2 JPS5440864B2 (en) | 1979-12-05 |
Family
ID=13562159
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7495275A Granted JPS51150873A (en) | 1975-06-18 | 1975-06-18 | Cleaning head supporting apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51150873A (en) |
-
1975
- 1975-06-18 JP JP7495275A patent/JPS51150873A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5440864B2 (en) | 1979-12-05 |
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