JPS51147967A - Method of controlling spot exposure - Google Patents

Method of controlling spot exposure

Info

Publication number
JPS51147967A
JPS51147967A JP50072294A JP7229475A JPS51147967A JP S51147967 A JPS51147967 A JP S51147967A JP 50072294 A JP50072294 A JP 50072294A JP 7229475 A JP7229475 A JP 7229475A JP S51147967 A JPS51147967 A JP S51147967A
Authority
JP
Japan
Prior art keywords
spot exposure
controlling spot
controlling
exposure
resembled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50072294A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5719853B2 (show.php
Inventor
Junichi Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50072294A priority Critical patent/JPS51147967A/ja
Publication of JPS51147967A publication Critical patent/JPS51147967A/ja
Publication of JPS5719853B2 publication Critical patent/JPS5719853B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP50072294A 1975-06-14 1975-06-14 Method of controlling spot exposure Granted JPS51147967A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50072294A JPS51147967A (en) 1975-06-14 1975-06-14 Method of controlling spot exposure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50072294A JPS51147967A (en) 1975-06-14 1975-06-14 Method of controlling spot exposure

Publications (2)

Publication Number Publication Date
JPS51147967A true JPS51147967A (en) 1976-12-18
JPS5719853B2 JPS5719853B2 (show.php) 1982-04-24

Family

ID=13485092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50072294A Granted JPS51147967A (en) 1975-06-14 1975-06-14 Method of controlling spot exposure

Country Status (1)

Country Link
JP (1) JPS51147967A (show.php)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5429980A (en) * 1977-08-10 1979-03-06 Hitachi Ltd Generation system for pattern
JPS5472683A (en) * 1977-11-01 1979-06-11 Buelow Fred K Electron beam device and method of using same
JPS559433A (en) * 1978-07-07 1980-01-23 Toshiba Corp Electron beam exposure device
JPS5535010U (show.php) * 1978-08-26 1980-03-06
JPS5630727A (en) * 1979-08-22 1981-03-27 Toshiba Corp Transmission system of exposure data

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5429980A (en) * 1977-08-10 1979-03-06 Hitachi Ltd Generation system for pattern
JPS5472683A (en) * 1977-11-01 1979-06-11 Buelow Fred K Electron beam device and method of using same
JPS559433A (en) * 1978-07-07 1980-01-23 Toshiba Corp Electron beam exposure device
JPS5535010U (show.php) * 1978-08-26 1980-03-06
JPS5630727A (en) * 1979-08-22 1981-03-27 Toshiba Corp Transmission system of exposure data

Also Published As

Publication number Publication date
JPS5719853B2 (show.php) 1982-04-24

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