JPS51146298A - Standard gas manufacturing device - Google Patents

Standard gas manufacturing device

Info

Publication number
JPS51146298A
JPS51146298A JP6955375A JP6955375A JPS51146298A JP S51146298 A JPS51146298 A JP S51146298A JP 6955375 A JP6955375 A JP 6955375A JP 6955375 A JP6955375 A JP 6955375A JP S51146298 A JPS51146298 A JP S51146298A
Authority
JP
Japan
Prior art keywords
standard gas
manufacturing device
gas manufacturing
trouble
requiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6955375A
Other languages
English (en)
Japanese (ja)
Other versions
JPS552014B2 (enExample
Inventor
Shigeo Matsui
Kyoko Otsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6955375A priority Critical patent/JPS51146298A/ja
Publication of JPS51146298A publication Critical patent/JPS51146298A/ja
Publication of JPS552014B2 publication Critical patent/JPS552014B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
JP6955375A 1975-06-11 1975-06-11 Standard gas manufacturing device Granted JPS51146298A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6955375A JPS51146298A (en) 1975-06-11 1975-06-11 Standard gas manufacturing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6955375A JPS51146298A (en) 1975-06-11 1975-06-11 Standard gas manufacturing device

Publications (2)

Publication Number Publication Date
JPS51146298A true JPS51146298A (en) 1976-12-15
JPS552014B2 JPS552014B2 (enExample) 1980-01-18

Family

ID=13406028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6955375A Granted JPS51146298A (en) 1975-06-11 1975-06-11 Standard gas manufacturing device

Country Status (1)

Country Link
JP (1) JPS51146298A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5225995U (enExample) * 1975-08-15 1977-02-23
JPS5225996U (enExample) * 1975-08-15 1977-02-23

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5225995U (enExample) * 1975-08-15 1977-02-23
JPS5225996U (enExample) * 1975-08-15 1977-02-23

Also Published As

Publication number Publication date
JPS552014B2 (enExample) 1980-01-18

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