JPS51140771A - Thermometric method of heated materials - Google Patents

Thermometric method of heated materials

Info

Publication number
JPS51140771A
JPS51140771A JP6419975A JP6419975A JPS51140771A JP S51140771 A JPS51140771 A JP S51140771A JP 6419975 A JP6419975 A JP 6419975A JP 6419975 A JP6419975 A JP 6419975A JP S51140771 A JPS51140771 A JP S51140771A
Authority
JP
Japan
Prior art keywords
heated materials
thermometric method
materials
heated
thermometric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6419975A
Other languages
Japanese (ja)
Inventor
Masato Ishioka
Hiroshi Maejima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6419975A priority Critical patent/JPS51140771A/en
Publication of JPS51140771A publication Critical patent/JPS51140771A/en
Pending legal-status Critical Current

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  • Measuring Temperature Or Quantity Of Heat (AREA)

Abstract

PURPOSE: The thermometric method of heated materials by which the thermocouple is fixed directly on a heated material in particular and measuring the temperatures of silicone wafer and other heater materials with precision.
COPYRIGHT: (C)1976,JPO&Japio
JP6419975A 1975-05-30 1975-05-30 Thermometric method of heated materials Pending JPS51140771A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6419975A JPS51140771A (en) 1975-05-30 1975-05-30 Thermometric method of heated materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6419975A JPS51140771A (en) 1975-05-30 1975-05-30 Thermometric method of heated materials

Publications (1)

Publication Number Publication Date
JPS51140771A true JPS51140771A (en) 1976-12-03

Family

ID=13251152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6419975A Pending JPS51140771A (en) 1975-05-30 1975-05-30 Thermometric method of heated materials

Country Status (1)

Country Link
JP (1) JPS51140771A (en)

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