JPS51140483A - Rinser drier mechanism - Google Patents

Rinser drier mechanism

Info

Publication number
JPS51140483A
JPS51140483A JP50064293A JP6429375A JPS51140483A JP S51140483 A JPS51140483 A JP S51140483A JP 50064293 A JP50064293 A JP 50064293A JP 6429375 A JP6429375 A JP 6429375A JP S51140483 A JPS51140483 A JP S51140483A
Authority
JP
Japan
Prior art keywords
drier mechanism
rinser
rinser drier
cleaned
articles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50064293A
Other languages
Japanese (ja)
Inventor
Kimio Muramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50064293A priority Critical patent/JPS51140483A/en
Publication of JPS51140483A publication Critical patent/JPS51140483A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide a rinser drier mechanism which can sufficiently enhance washing effect of articles to be cleaned.
JP50064293A 1975-05-30 1975-05-30 Rinser drier mechanism Pending JPS51140483A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50064293A JPS51140483A (en) 1975-05-30 1975-05-30 Rinser drier mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50064293A JPS51140483A (en) 1975-05-30 1975-05-30 Rinser drier mechanism

Publications (1)

Publication Number Publication Date
JPS51140483A true JPS51140483A (en) 1976-12-03

Family

ID=13254033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50064293A Pending JPS51140483A (en) 1975-05-30 1975-05-30 Rinser drier mechanism

Country Status (1)

Country Link
JP (1) JPS51140483A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS548456A (en) * 1977-06-22 1979-01-22 Hitachi Ltd Wafer cleansing/drying device
JPS5669830A (en) * 1979-11-13 1981-06-11 Nec Kyushu Ltd Photo resist processing device for semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS548456A (en) * 1977-06-22 1979-01-22 Hitachi Ltd Wafer cleansing/drying device
JPS5669830A (en) * 1979-11-13 1981-06-11 Nec Kyushu Ltd Photo resist processing device for semiconductor device

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