JPS51136277A - Lens for electron particle beam - Google Patents

Lens for electron particle beam

Info

Publication number
JPS51136277A
JPS51136277A JP50059685A JP5968575A JPS51136277A JP S51136277 A JPS51136277 A JP S51136277A JP 50059685 A JP50059685 A JP 50059685A JP 5968575 A JP5968575 A JP 5968575A JP S51136277 A JPS51136277 A JP S51136277A
Authority
JP
Japan
Prior art keywords
lens
particle beam
electron particle
electrodes
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50059685A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5528179B2 (enrdf_load_stackoverflow
Inventor
Kyuzo Kawakatsu
Shigeo Okayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP50059685A priority Critical patent/JPS51136277A/ja
Publication of JPS51136277A publication Critical patent/JPS51136277A/ja
Publication of JPS5528179B2 publication Critical patent/JPS5528179B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP50059685A 1975-05-21 1975-05-21 Lens for electron particle beam Granted JPS51136277A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50059685A JPS51136277A (en) 1975-05-21 1975-05-21 Lens for electron particle beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50059685A JPS51136277A (en) 1975-05-21 1975-05-21 Lens for electron particle beam

Publications (2)

Publication Number Publication Date
JPS51136277A true JPS51136277A (en) 1976-11-25
JPS5528179B2 JPS5528179B2 (enrdf_load_stackoverflow) 1980-07-25

Family

ID=13120293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50059685A Granted JPS51136277A (en) 1975-05-21 1975-05-21 Lens for electron particle beam

Country Status (1)

Country Link
JP (1) JPS51136277A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6091544A (ja) * 1983-10-24 1985-05-22 Anelva Corp オ−ジエ分析装置
JP2010067530A (ja) * 2008-09-12 2010-03-25 Hitachi High-Technologies Corp 荷電粒子線応用装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6177487U (enrdf_load_stackoverflow) * 1984-10-29 1986-05-24

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5330628A (en) * 1976-09-03 1978-03-23 Tone Kenzai Kougiyou Kk Production of waterrpermeable concrete blocks used for road

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5330628A (en) * 1976-09-03 1978-03-23 Tone Kenzai Kougiyou Kk Production of waterrpermeable concrete blocks used for road

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6091544A (ja) * 1983-10-24 1985-05-22 Anelva Corp オ−ジエ分析装置
JP2010067530A (ja) * 2008-09-12 2010-03-25 Hitachi High-Technologies Corp 荷電粒子線応用装置

Also Published As

Publication number Publication date
JPS5528179B2 (enrdf_load_stackoverflow) 1980-07-25

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