JPS5112990B2 - - Google Patents

Info

Publication number
JPS5112990B2
JPS5112990B2 JP47094673A JP9467372A JPS5112990B2 JP S5112990 B2 JPS5112990 B2 JP S5112990B2 JP 47094673 A JP47094673 A JP 47094673A JP 9467372 A JP9467372 A JP 9467372A JP S5112990 B2 JPS5112990 B2 JP S5112990B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47094673A
Other languages
Japanese (ja)
Other versions
JPS4847772A (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4847772A publication Critical patent/JPS4847772A/ja
Publication of JPS5112990B2 publication Critical patent/JPS5112990B2/ja
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/40Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP47094673A 1971-10-13 1972-09-22 Expired JPS5112990B2 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US18892171A 1971-10-13 1971-10-13

Publications (2)

Publication Number Publication Date
JPS4847772A JPS4847772A (https=) 1973-07-06
JPS5112990B2 true JPS5112990B2 (https=) 1976-04-23

Family

ID=22695109

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47094673A Expired JPS5112990B2 (https=) 1971-10-13 1972-09-22

Country Status (4)

Country Link
JP (1) JPS5112990B2 (https=)
DE (1) DE2242875A1 (https=)
FR (1) FR2156406A1 (https=)
IT (1) IT967610B (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4980981A (https=) * 1972-12-11 1974-08-05
JPS5534704B2 (https=) * 1974-08-19 1980-09-09
JPS53108278A (en) * 1977-11-14 1978-09-20 Nec Corp Manufacture of semiconductor device
GB1595659A (en) * 1978-05-25 1981-08-12 Standard Telephones Cables Ltd Providing conductive tracks on semiconductor devices

Also Published As

Publication number Publication date
FR2156406A1 (en) 1973-05-25
FR2156406B1 (https=) 1975-03-28
IT967610B (it) 1974-03-11
DE2242875A1 (de) 1973-04-19
JPS4847772A (https=) 1973-07-06

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