JPS5112769A - - Google Patents

Info

Publication number
JPS5112769A
JPS5112769A JP49083226A JP8322674A JPS5112769A JP S5112769 A JPS5112769 A JP S5112769A JP 49083226 A JP49083226 A JP 49083226A JP 8322674 A JP8322674 A JP 8322674A JP S5112769 A JPS5112769 A JP S5112769A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49083226A
Other languages
Japanese (ja)
Other versions
JPS5312778B2 (enExample
Inventor
Minoru Tauchi
Yasuo Yamada
Kyoshi Hisatomi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP8322674A priority Critical patent/JPS5312778B2/ja
Publication of JPS5112769A publication Critical patent/JPS5112769A/ja
Publication of JPS5312778B2 publication Critical patent/JPS5312778B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP8322674A 1974-07-22 1974-07-22 Expired JPS5312778B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8322674A JPS5312778B2 (enExample) 1974-07-22 1974-07-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8322674A JPS5312778B2 (enExample) 1974-07-22 1974-07-22

Publications (2)

Publication Number Publication Date
JPS5112769A true JPS5112769A (enExample) 1976-01-31
JPS5312778B2 JPS5312778B2 (enExample) 1978-05-04

Family

ID=13796392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8322674A Expired JPS5312778B2 (enExample) 1974-07-22 1974-07-22

Country Status (1)

Country Link
JP (1) JPS5312778B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017210376A (ja) * 2016-05-23 2017-11-30 株式会社Sumco シリコン単結晶の製造方法、シリコンウェーハの製造方法およびシリコン単結晶

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017210376A (ja) * 2016-05-23 2017-11-30 株式会社Sumco シリコン単結晶の製造方法、シリコンウェーハの製造方法およびシリコン単結晶

Also Published As

Publication number Publication date
JPS5312778B2 (enExample) 1978-05-04

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