JPS5111766B1 - - Google Patents
Info
- Publication number
- JPS5111766B1 JPS5111766B1 JP5889170A JP5889170A JPS5111766B1 JP S5111766 B1 JPS5111766 B1 JP S5111766B1 JP 5889170 A JP5889170 A JP 5889170A JP 5889170 A JP5889170 A JP 5889170A JP S5111766 B1 JPS5111766 B1 JP S5111766B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- Y02E60/12—
Landscapes
- Primary Cells (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5889170A JPS5111766B1 (enExample) | 1970-07-06 | 1970-07-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5889170A JPS5111766B1 (enExample) | 1970-07-06 | 1970-07-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5111766B1 true JPS5111766B1 (enExample) | 1976-04-14 |
Family
ID=13097390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5889170A Pending JPS5111766B1 (enExample) | 1970-07-06 | 1970-07-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5111766B1 (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5948041U (ja) * | 1983-08-23 | 1984-03-30 | 株式会社日立製作所 | 半導体マスク保持装置 |
| JPS6041043U (ja) * | 1983-08-26 | 1985-03-23 | 株式会社東芝 | パタ−ン欠陥検査装置用試料保持機構 |
| JPH0316374U (enExample) * | 1989-03-29 | 1991-02-19 |
-
1970
- 1970-07-06 JP JP5889170A patent/JPS5111766B1/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5948041U (ja) * | 1983-08-23 | 1984-03-30 | 株式会社日立製作所 | 半導体マスク保持装置 |
| JPS6041043U (ja) * | 1983-08-26 | 1985-03-23 | 株式会社東芝 | パタ−ン欠陥検査装置用試料保持機構 |
| JPH0316374U (enExample) * | 1989-03-29 | 1991-02-19 |