JPS51115066U - - Google Patents
Info
- Publication number
- JPS51115066U JPS51115066U JP3361575U JP3361575U JPS51115066U JP S51115066 U JPS51115066 U JP S51115066U JP 3361575 U JP3361575 U JP 3361575U JP 3361575 U JP3361575 U JP 3361575U JP S51115066 U JPS51115066 U JP S51115066U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Spectrometry And Color Measurement (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Solid State Image Pick-Up Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3361575U JPS5711228Y2 (https=) | 1975-03-14 | 1975-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3361575U JPS5711228Y2 (https=) | 1975-03-14 | 1975-03-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51115066U true JPS51115066U (https=) | 1976-09-18 |
| JPS5711228Y2 JPS5711228Y2 (https=) | 1982-03-05 |
Family
ID=28146848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3361575U Expired JPS5711228Y2 (https=) | 1975-03-14 | 1975-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5711228Y2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01321325A (ja) * | 1988-06-24 | 1989-12-27 | Hitachi Ltd | 分光器及びそれを用いた投影露光装置並びに投影露光方法 |
| WO2024143124A1 (ja) * | 2022-12-28 | 2024-07-04 | 株式会社堀場製作所 | 分光分析装置及び分光分析方法 |
-
1975
- 1975-03-14 JP JP3361575U patent/JPS5711228Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01321325A (ja) * | 1988-06-24 | 1989-12-27 | Hitachi Ltd | 分光器及びそれを用いた投影露光装置並びに投影露光方法 |
| WO2024143124A1 (ja) * | 2022-12-28 | 2024-07-04 | 株式会社堀場製作所 | 分光分析装置及び分光分析方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5711228Y2 (https=) | 1982-03-05 |