JPS51114142A - Method of manufacturing diffraction grid - Google Patents
Method of manufacturing diffraction gridInfo
- Publication number
- JPS51114142A JPS51114142A JP3896875A JP3896875A JPS51114142A JP S51114142 A JPS51114142 A JP S51114142A JP 3896875 A JP3896875 A JP 3896875A JP 3896875 A JP3896875 A JP 3896875A JP S51114142 A JPS51114142 A JP S51114142A
- Authority
- JP
- Japan
- Prior art keywords
- diffraction grid
- manufacturing diffraction
- manufacturing
- manufacture
- adjusting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3896875A JPS51114142A (en) | 1975-03-31 | 1975-03-31 | Method of manufacturing diffraction grid |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3896875A JPS51114142A (en) | 1975-03-31 | 1975-03-31 | Method of manufacturing diffraction grid |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51114142A true JPS51114142A (en) | 1976-10-07 |
Family
ID=12539948
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3896875A Pending JPS51114142A (en) | 1975-03-31 | 1975-03-31 | Method of manufacturing diffraction grid |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51114142A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5937520A (ja) * | 1982-08-26 | 1984-03-01 | Nec Corp | 波長多重分波器 |
JPS60156004A (ja) * | 1984-01-12 | 1985-08-16 | Toppan Printing Co Ltd | 回折格子露光装置 |
JPH04289411A (ja) * | 1991-03-18 | 1992-10-14 | Fujitsu Ltd | 測長sem用基準サンプルの製造方法 |
-
1975
- 1975-03-31 JP JP3896875A patent/JPS51114142A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5937520A (ja) * | 1982-08-26 | 1984-03-01 | Nec Corp | 波長多重分波器 |
JPS60156004A (ja) * | 1984-01-12 | 1985-08-16 | Toppan Printing Co Ltd | 回折格子露光装置 |
JPH04289411A (ja) * | 1991-03-18 | 1992-10-14 | Fujitsu Ltd | 測長sem用基準サンプルの製造方法 |
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