JPS51113468A - Solid surface processing system - Google Patents

Solid surface processing system

Info

Publication number
JPS51113468A
JPS51113468A JP50038346A JP3834675A JPS51113468A JP S51113468 A JPS51113468 A JP S51113468A JP 50038346 A JP50038346 A JP 50038346A JP 3834675 A JP3834675 A JP 3834675A JP S51113468 A JPS51113468 A JP S51113468A
Authority
JP
Japan
Prior art keywords
solid surface
processing system
surface processing
synergism
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50038346A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5547452B2 (enExample
Inventor
Toshinobu Takagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP50038346A priority Critical patent/JPS51113468A/ja
Publication of JPS51113468A publication Critical patent/JPS51113468A/ja
Publication of JPS5547452B2 publication Critical patent/JPS5547452B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
  • Bipolar Transistors (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP50038346A 1975-03-29 1975-03-29 Solid surface processing system Granted JPS51113468A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50038346A JPS51113468A (en) 1975-03-29 1975-03-29 Solid surface processing system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50038346A JPS51113468A (en) 1975-03-29 1975-03-29 Solid surface processing system

Publications (2)

Publication Number Publication Date
JPS51113468A true JPS51113468A (en) 1976-10-06
JPS5547452B2 JPS5547452B2 (enExample) 1980-11-29

Family

ID=12522712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50038346A Granted JPS51113468A (en) 1975-03-29 1975-03-29 Solid surface processing system

Country Status (1)

Country Link
JP (1) JPS51113468A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58115741A (ja) * 1981-12-28 1983-07-09 Fujitsu Ltd 複合ビ−ム照射装置
JPS5966124A (ja) * 1982-10-08 1984-04-14 Hitachi Ltd 表面処理方法および装置
JPS6243134A (ja) * 1985-08-20 1987-02-25 Mitsubishi Electric Corp 半導体製造装置
JPH05206049A (ja) * 1992-01-30 1993-08-13 Matsushita Electric Ind Co Ltd イオン打ち込み方法及びイオン打ち込み装置
WO2009138134A1 (de) * 2008-05-15 2009-11-19 Carl Zeiss Nts Gmbh Teilchenstrahlgerät mit einer reinigungsvorrichtung

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0129603A4 (en) * 1982-12-17 1985-06-10 Inoue Japax Res CUTTING DEVICE WITH LASER.
JPS61100694U (enExample) * 1984-12-06 1986-06-27

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4941455A (enExample) * 1972-05-03 1974-04-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4941455A (enExample) * 1972-05-03 1974-04-18

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58115741A (ja) * 1981-12-28 1983-07-09 Fujitsu Ltd 複合ビ−ム照射装置
JPS5966124A (ja) * 1982-10-08 1984-04-14 Hitachi Ltd 表面処理方法および装置
JPS6243134A (ja) * 1985-08-20 1987-02-25 Mitsubishi Electric Corp 半導体製造装置
JPH05206049A (ja) * 1992-01-30 1993-08-13 Matsushita Electric Ind Co Ltd イオン打ち込み方法及びイオン打ち込み装置
WO2009138134A1 (de) * 2008-05-15 2009-11-19 Carl Zeiss Nts Gmbh Teilchenstrahlgerät mit einer reinigungsvorrichtung
US8283641B2 (en) 2008-05-15 2012-10-09 Carl Zeiss Nts Gmbh Positioning device for a particle beam apparatus

Also Published As

Publication number Publication date
JPS5547452B2 (enExample) 1980-11-29

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