JPS51107825A - - Google Patents

Info

Publication number
JPS51107825A
JPS51107825A JP50032167A JP3216775A JPS51107825A JP S51107825 A JPS51107825 A JP S51107825A JP 50032167 A JP50032167 A JP 50032167A JP 3216775 A JP3216775 A JP 3216775A JP S51107825 A JPS51107825 A JP S51107825A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50032167A
Other versions
JPS5628245B2 (ja
Inventor
Yoshio Kawamura
Shigeo Moryama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3216775A priority Critical patent/JPS5628245B2/ja
Publication of JPS51107825A publication Critical patent/JPS51107825A/ja
Publication of JPS5628245B2 publication Critical patent/JPS5628245B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Feedback Control In General (AREA)
  • Focusing (AREA)
  • Lens Barrels (AREA)
  • Microscoopes, Condenser (AREA)
  • Automatic Focus Adjustment (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP3216775A 1975-03-19 1975-03-19 Expired JPS5628245B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3216775A JPS5628245B2 (ja) 1975-03-19 1975-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3216775A JPS5628245B2 (ja) 1975-03-19 1975-03-19

Publications (2)

Publication Number Publication Date
JPS51107825A true JPS51107825A (ja) 1976-09-24
JPS5628245B2 JPS5628245B2 (ja) 1981-06-30

Family

ID=12351372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3216775A Expired JPS5628245B2 (ja) 1975-03-19 1975-03-19

Country Status (1)

Country Link
JP (1) JPS5628245B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5535324A (en) * 1978-09-04 1980-03-12 Hitachi Ltd Automatic focusing device
JPS62122215A (ja) * 1985-11-22 1987-06-03 Hitachi Ltd 投影露光装置
JP2013187206A (ja) * 2012-03-05 2013-09-19 Canon Inc 検出装置、露光装置及びデバイスを製造する方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57105042U (ja) * 1980-12-20 1982-06-28
JPS6071179U (ja) * 1983-10-21 1985-05-20 富士通テン株式会社 ツマミ一体型の前面飾り板

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS444858Y1 (ja) * 1968-09-13 1969-02-21
DE1472298A1 (de) * 1966-09-29 1969-03-13 Leitz Ernst Gmbh Anordnung zur Fuehrung des Objektivs eines optischen Geraetes
JPS4412426Y1 (ja) * 1966-03-31 1969-05-23
JPS5193238A (en) * 1975-02-14 1976-08-16 Kenbikyono jidoshotensochi

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1200120B (de) * 1963-03-19 1965-09-02 Ncr Co Fokussiersystem zur Verwendung in Verkleinerungskameras

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4412426Y1 (ja) * 1966-03-31 1969-05-23
DE1472298A1 (de) * 1966-09-29 1969-03-13 Leitz Ernst Gmbh Anordnung zur Fuehrung des Objektivs eines optischen Geraetes
JPS444858Y1 (ja) * 1968-09-13 1969-02-21
JPS5193238A (en) * 1975-02-14 1976-08-16 Kenbikyono jidoshotensochi

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5535324A (en) * 1978-09-04 1980-03-12 Hitachi Ltd Automatic focusing device
JPS62122215A (ja) * 1985-11-22 1987-06-03 Hitachi Ltd 投影露光装置
JP2013187206A (ja) * 2012-03-05 2013-09-19 Canon Inc 検出装置、露光装置及びデバイスを製造する方法
US9523927B2 (en) 2012-03-05 2016-12-20 Canon Kabushiki Kaisha Exposure apparatus with detection apparatus for detection of upper and lower surface marks, and device manufacturing method

Also Published As

Publication number Publication date
JPS5628245B2 (ja) 1981-06-30

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