JPS51107825A - - Google Patents
Info
- Publication number
- JPS51107825A JPS51107825A JP50032167A JP3216775A JPS51107825A JP S51107825 A JPS51107825 A JP S51107825A JP 50032167 A JP50032167 A JP 50032167A JP 3216775 A JP3216775 A JP 3216775A JP S51107825 A JPS51107825 A JP S51107825A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Feedback Control In General (AREA)
- Focusing (AREA)
- Lens Barrels (AREA)
- Microscoopes, Condenser (AREA)
- Automatic Focus Adjustment (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3216775A JPS5628245B2 (ja) | 1975-03-19 | 1975-03-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3216775A JPS5628245B2 (ja) | 1975-03-19 | 1975-03-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51107825A true JPS51107825A (ja) | 1976-09-24 |
JPS5628245B2 JPS5628245B2 (ja) | 1981-06-30 |
Family
ID=12351372
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3216775A Expired JPS5628245B2 (ja) | 1975-03-19 | 1975-03-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5628245B2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5535324A (en) * | 1978-09-04 | 1980-03-12 | Hitachi Ltd | Automatic focusing device |
JPS62122215A (ja) * | 1985-11-22 | 1987-06-03 | Hitachi Ltd | 投影露光装置 |
JP2013187206A (ja) * | 2012-03-05 | 2013-09-19 | Canon Inc | 検出装置、露光装置及びデバイスを製造する方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57105042U (ja) * | 1980-12-20 | 1982-06-28 | ||
JPS6071179U (ja) * | 1983-10-21 | 1985-05-20 | 富士通テン株式会社 | ツマミ一体型の前面飾り板 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS444858Y1 (ja) * | 1968-09-13 | 1969-02-21 | ||
DE1472298A1 (de) * | 1966-09-29 | 1969-03-13 | Leitz Ernst Gmbh | Anordnung zur Fuehrung des Objektivs eines optischen Geraetes |
JPS4412426Y1 (ja) * | 1966-03-31 | 1969-05-23 | ||
JPS5193238A (en) * | 1975-02-14 | 1976-08-16 | Kenbikyono jidoshotensochi |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1200120B (de) * | 1963-03-19 | 1965-09-02 | Ncr Co | Fokussiersystem zur Verwendung in Verkleinerungskameras |
-
1975
- 1975-03-19 JP JP3216775A patent/JPS5628245B2/ja not_active Expired
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4412426Y1 (ja) * | 1966-03-31 | 1969-05-23 | ||
DE1472298A1 (de) * | 1966-09-29 | 1969-03-13 | Leitz Ernst Gmbh | Anordnung zur Fuehrung des Objektivs eines optischen Geraetes |
JPS444858Y1 (ja) * | 1968-09-13 | 1969-02-21 | ||
JPS5193238A (en) * | 1975-02-14 | 1976-08-16 | Kenbikyono jidoshotensochi |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5535324A (en) * | 1978-09-04 | 1980-03-12 | Hitachi Ltd | Automatic focusing device |
JPS62122215A (ja) * | 1985-11-22 | 1987-06-03 | Hitachi Ltd | 投影露光装置 |
JP2013187206A (ja) * | 2012-03-05 | 2013-09-19 | Canon Inc | 検出装置、露光装置及びデバイスを製造する方法 |
US9523927B2 (en) | 2012-03-05 | 2016-12-20 | Canon Kabushiki Kaisha | Exposure apparatus with detection apparatus for detection of upper and lower surface marks, and device manufacturing method |
Also Published As
Publication number | Publication date |
---|---|
JPS5628245B2 (ja) | 1981-06-30 |