JPS51106641A - Ionpureeteingusochi - Google Patents

Ionpureeteingusochi

Info

Publication number
JPS51106641A
JPS51106641A JP50032033A JP3203375A JPS51106641A JP S51106641 A JPS51106641 A JP S51106641A JP 50032033 A JP50032033 A JP 50032033A JP 3203375 A JP3203375 A JP 3203375A JP S51106641 A JPS51106641 A JP S51106641A
Authority
JP
Japan
Prior art keywords
ionpureeteingusochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50032033A
Other languages
English (en)
Japanese (ja)
Inventor
Yasuhiro Shimizu
Koichi Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50032033A priority Critical patent/JPS51106641A/ja
Publication of JPS51106641A publication Critical patent/JPS51106641A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP50032033A 1975-03-17 1975-03-17 Ionpureeteingusochi Pending JPS51106641A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50032033A JPS51106641A (en) 1975-03-17 1975-03-17 Ionpureeteingusochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50032033A JPS51106641A (en) 1975-03-17 1975-03-17 Ionpureeteingusochi

Publications (1)

Publication Number Publication Date
JPS51106641A true JPS51106641A (en) 1976-09-21

Family

ID=12347547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50032033A Pending JPS51106641A (en) 1975-03-17 1975-03-17 Ionpureeteingusochi

Country Status (1)

Country Link
JP (1) JPS51106641A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4579639A (en) * 1982-07-15 1986-04-01 Citizen Watch Company Limited Method of sensing the amount of a thin film deposited during an ion plating process
JPH05320884A (ja) * 1991-07-30 1993-12-07 Showa Shinku:Kk 高周波イオンプレーティング装置
JPH07122590A (ja) * 1993-10-20 1995-05-12 Nec Corp 半導体装置
JPH08255814A (ja) * 1995-03-17 1996-10-01 Nec Corp テープキャリアを用いた半導体装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4961031A (enrdf_load_stackoverflow) * 1972-10-17 1974-06-13
JPS49113733A (enrdf_load_stackoverflow) * 1973-03-05 1974-10-30
JPS5022780A (enrdf_load_stackoverflow) * 1973-07-03 1975-03-11

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4961031A (enrdf_load_stackoverflow) * 1972-10-17 1974-06-13
JPS49113733A (enrdf_load_stackoverflow) * 1973-03-05 1974-10-30
JPS5022780A (enrdf_load_stackoverflow) * 1973-07-03 1975-03-11

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4579639A (en) * 1982-07-15 1986-04-01 Citizen Watch Company Limited Method of sensing the amount of a thin film deposited during an ion plating process
JPH05320884A (ja) * 1991-07-30 1993-12-07 Showa Shinku:Kk 高周波イオンプレーティング装置
JPH07122590A (ja) * 1993-10-20 1995-05-12 Nec Corp 半導体装置
JPH08255814A (ja) * 1995-03-17 1996-10-01 Nec Corp テープキャリアを用いた半導体装置

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