JPS51106218U - - Google Patents

Info

Publication number
JPS51106218U
JPS51106218U JP2421675U JP2421675U JPS51106218U JP S51106218 U JPS51106218 U JP S51106218U JP 2421675 U JP2421675 U JP 2421675U JP 2421675 U JP2421675 U JP 2421675U JP S51106218 U JPS51106218 U JP S51106218U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2421675U
Other languages
Japanese (ja)
Other versions
JPS5617952Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2421675U priority Critical patent/JPS5617952Y2/ja
Publication of JPS51106218U publication Critical patent/JPS51106218U/ja
Application granted granted Critical
Publication of JPS5617952Y2 publication Critical patent/JPS5617952Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP2421675U 1975-02-24 1975-02-24 Expired JPS5617952Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2421675U JPS5617952Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-02-24 1975-02-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2421675U JPS5617952Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-02-24 1975-02-24

Publications (2)

Publication Number Publication Date
JPS51106218U true JPS51106218U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-08-25
JPS5617952Y2 JPS5617952Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-04-27

Family

ID=28120581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2421675U Expired JPS5617952Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-02-24 1975-02-24

Country Status (1)

Country Link
JP (1) JPS5617952Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5571027A (en) * 1978-11-24 1980-05-28 Hitachi Ltd Continuous surface treatment apparatus
JPS5588335A (en) * 1978-12-07 1980-07-04 Kokusai Electric Co Ltd Automatic conveying mechanism for plasma etching/ stripping device
JPS57117340A (en) * 1981-11-05 1982-07-21 Tokyo Ohka Kogyo Co Ltd Improved plasma reaction treatment apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5571027A (en) * 1978-11-24 1980-05-28 Hitachi Ltd Continuous surface treatment apparatus
JPS5588335A (en) * 1978-12-07 1980-07-04 Kokusai Electric Co Ltd Automatic conveying mechanism for plasma etching/ stripping device
JPS57117340A (en) * 1981-11-05 1982-07-21 Tokyo Ohka Kogyo Co Ltd Improved plasma reaction treatment apparatus

Also Published As

Publication number Publication date
JPS5617952Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-04-27

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