JPS51103449U - - Google Patents
Info
- Publication number
- JPS51103449U JPS51103449U JP2152675U JP2152675U JPS51103449U JP S51103449 U JPS51103449 U JP S51103449U JP 2152675 U JP2152675 U JP 2152675U JP 2152675 U JP2152675 U JP 2152675U JP S51103449 U JPS51103449 U JP S51103449U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Stacking Of Articles And Auxiliary Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2152675U JPS553151Y2 (nl) | 1975-02-18 | 1975-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2152675U JPS553151Y2 (nl) | 1975-02-18 | 1975-02-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51103449U true JPS51103449U (nl) | 1976-08-19 |
| JPS553151Y2 JPS553151Y2 (nl) | 1980-01-25 |
Family
ID=28113068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2152675U Expired JPS553151Y2 (nl) | 1975-02-18 | 1975-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS553151Y2 (nl) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3364408B2 (ja) * | 1997-04-18 | 2003-01-08 | 株式会社藤森技術研究所 | 基板表面検査装置 |
-
1975
- 1975-02-18 JP JP2152675U patent/JPS553151Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS553151Y2 (nl) | 1980-01-25 |