JPS51103449U - - Google Patents

Info

Publication number
JPS51103449U
JPS51103449U JP2152675U JP2152675U JPS51103449U JP S51103449 U JPS51103449 U JP S51103449U JP 2152675 U JP2152675 U JP 2152675U JP 2152675 U JP2152675 U JP 2152675U JP S51103449 U JPS51103449 U JP S51103449U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2152675U
Other languages
Japanese (ja)
Other versions
JPS553151Y2 (it
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2152675U priority Critical patent/JPS553151Y2/ja
Publication of JPS51103449U publication Critical patent/JPS51103449U/ja
Application granted granted Critical
Publication of JPS553151Y2 publication Critical patent/JPS553151Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Stacking Of Articles And Auxiliary Devices (AREA)
JP2152675U 1975-02-18 1975-02-18 Expired JPS553151Y2 (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2152675U JPS553151Y2 (it) 1975-02-18 1975-02-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2152675U JPS553151Y2 (it) 1975-02-18 1975-02-18

Publications (2)

Publication Number Publication Date
JPS51103449U true JPS51103449U (it) 1976-08-19
JPS553151Y2 JPS553151Y2 (it) 1980-01-25

Family

ID=28113068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2152675U Expired JPS553151Y2 (it) 1975-02-18 1975-02-18

Country Status (1)

Country Link
JP (1) JPS553151Y2 (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3364408B2 (ja) * 1997-04-18 2003-01-08 株式会社藤森技術研究所 基板表面検査装置

Also Published As

Publication number Publication date
JPS553151Y2 (it) 1980-01-25

Similar Documents

Publication Publication Date Title
JPS5433023B2 (it)
JPS5622647Y2 (it)
JPS553151Y2 (it)
JPS51112615U (it)
JPS5237005U (it)
JPS51148195U (it)
JPS5263999U (it)
JPS51139063U (it)
JPS5228487U (it)
JPS5257564U (it)
DD126535A5 (it)
CH599353A5 (it)
CH596523A5 (it)
CH595595A5 (it)
CH595661A5 (it)
CH596017A5 (it)
CH597410A5 (it)
CH593100A5 (it)
CH593196A5 (it)
CH595519A5 (it)
CH593768A5 (it)
CH597776A5 (it)
CH595716A5 (it)
CH602373A5 (it)
CH597568A5 (it)