JPS51102964A - - Google Patents
Info
- Publication number
- JPS51102964A JPS51102964A JP50027303A JP2730375A JPS51102964A JP S51102964 A JPS51102964 A JP S51102964A JP 50027303 A JP50027303 A JP 50027303A JP 2730375 A JP2730375 A JP 2730375A JP S51102964 A JPS51102964 A JP S51102964A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50027303A JPS51102964A (ja) | 1975-03-05 | 1975-03-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50027303A JPS51102964A (ja) | 1975-03-05 | 1975-03-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS51102964A true JPS51102964A (ja) | 1976-09-10 |
Family
ID=12217311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50027303A Pending JPS51102964A (ja) | 1975-03-05 | 1975-03-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51102964A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007142442A (ja) * | 1997-07-01 | 2007-06-07 | Steag Rtp Systems Gmbh | シリコン基板の高速昇降温処理（ｒｔｐ）方法 |
-
1975
- 1975-03-05 JP JP50027303A patent/JPS51102964A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007142442A (ja) * | 1997-07-01 | 2007-06-07 | Steag Rtp Systems Gmbh | シリコン基板の高速昇降温処理（ｒｔｐ）方法 |