JPS51101463A - - Google Patents
Info
- Publication number
- JPS51101463A JPS51101463A JP50025969A JP2596975A JPS51101463A JP S51101463 A JPS51101463 A JP S51101463A JP 50025969 A JP50025969 A JP 50025969A JP 2596975 A JP2596975 A JP 2596975A JP S51101463 A JPS51101463 A JP S51101463A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50025969A JPS51101463A (de) | 1975-03-05 | 1975-03-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50025969A JPS51101463A (de) | 1975-03-05 | 1975-03-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS51101463A true JPS51101463A (de) | 1976-09-07 |
Family
ID=12180548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50025969A Pending JPS51101463A (de) | 1975-03-05 | 1975-03-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51101463A (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011092757A1 (ja) * | 2010-01-27 | 2011-08-04 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
| US9202667B2 (en) | 2009-02-19 | 2015-12-01 | Hitachi High-Technologies Corporation | Charged particle radiation device with bandpass detection |
-
1975
- 1975-03-05 JP JP50025969A patent/JPS51101463A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9202667B2 (en) | 2009-02-19 | 2015-12-01 | Hitachi High-Technologies Corporation | Charged particle radiation device with bandpass detection |
| WO2011092757A1 (ja) * | 2010-01-27 | 2011-08-04 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
| JP5576406B2 (ja) * | 2010-01-27 | 2014-08-20 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |