JPS5099464A - - Google Patents
Info
- Publication number
- JPS5099464A JPS5099464A JP49137809A JP13780974A JPS5099464A JP S5099464 A JPS5099464 A JP S5099464A JP 49137809 A JP49137809 A JP 49137809A JP 13780974 A JP13780974 A JP 13780974A JP S5099464 A JPS5099464 A JP S5099464A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1472—Deflecting along given lines
- H01J37/1474—Scanning means
- H01J37/1475—Scanning means magnetic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US429410A US3930181A (en) | 1973-12-28 | 1973-12-28 | Lens and deflection unit arrangement for electron beam columns |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5099464A true JPS5099464A (en) | 1975-08-07 |
Family
ID=23703121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49137809A Pending JPS5099464A (en) | 1973-12-28 | 1974-12-03 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3930181A (en) |
| JP (1) | JPS5099464A (en) |
| CA (1) | CA1024667A (en) |
| DE (1) | DE2449000A1 (en) |
| FR (1) | FR2256526A1 (en) |
| IT (1) | IT1026651B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013161684A1 (en) * | 2012-04-24 | 2013-10-31 | 株式会社日立ハイテクノロジーズ | Charged particle beam device |
| US10406268B2 (en) | 2011-04-29 | 2019-09-10 | Medtronic, Inc. | Blood fluid removal system performance monitoring |
| US10420872B2 (en) | 2014-12-10 | 2019-09-24 | Medtronic, Inc. | Degassing system for dialysis |
| US10478545B2 (en) | 2013-11-26 | 2019-11-19 | Medtronic, Inc. | Parallel modules for in-line recharging of sorbents using alternate duty cycles |
| US10506933B2 (en) | 2011-04-29 | 2019-12-17 | Medtronic, Inc. | Method and device to monitor patients with kidney disease |
| US10532141B2 (en) | 2013-02-01 | 2020-01-14 | Medtronic, Inc. | Systems and methods for multifunctional volumetric fluid control |
| US10543052B2 (en) | 2013-02-01 | 2020-01-28 | Medtronic, Inc. | Portable dialysis cabinet |
| US10561776B2 (en) | 2013-02-01 | 2020-02-18 | Medtronic, Inc. | Fluid circuit for delivery of renal replacement therapies |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2386109A1 (en) * | 1977-04-01 | 1978-10-27 | Cgr Mev | G-RAY IRRADIATION HEAD FOR PANORAMIC IRRADIATION AND G-RAY GENERATOR INCLUDING SUCH IRRADIATION HEAD |
| US4475044A (en) * | 1979-04-23 | 1984-10-02 | Hitachi, Ltd. | Apparatus for focus-deflecting a charged particle beam |
| JPS5760647A (en) * | 1980-09-26 | 1982-04-12 | Jeol Ltd | Magnetic field intensity control method |
| US4376249A (en) * | 1980-11-06 | 1983-03-08 | International Business Machines Corporation | Variable axis electron beam projection system |
| JPS57206173A (en) * | 1981-06-15 | 1982-12-17 | Nippon Telegr & Teleph Corp <Ntt> | Focusing deflecting device for charged corpuscule beam |
| US4395691A (en) * | 1982-03-04 | 1983-07-26 | Hughes Aircraft Company | Beam deflection system |
| US4544846A (en) * | 1983-06-28 | 1985-10-01 | International Business Machines Corporation | Variable axis immersion lens electron beam projection system |
| DE3521464A1 (en) * | 1985-06-14 | 1986-12-18 | Siemens AG, 1000 Berlin und 8000 München | SPECTROMETER LENS FOR ELECTRON BEAM MEASUREMENT TECHNOLOGY |
| EP0236807A3 (en) * | 1986-03-07 | 1990-05-16 | Siemens Aktiengesellschaft | Spectrometer objective for the corpuscular beam measuring technique |
| US6090528A (en) * | 1999-10-27 | 2000-07-18 | Gordon; Michael S. | Spot-to-spot stitching in electron beam lithography utilizing square aperture with serrated edge |
| EP1238405B1 (en) * | 1999-12-14 | 2014-06-18 | Applied Materials, Inc. | Method and system for the examination of specimen using a charged particle beam |
| US7800062B2 (en) * | 2002-06-11 | 2010-09-21 | Applied Materials, Inc. | Method and system for the examination of specimen |
| US7528614B2 (en) | 2004-12-22 | 2009-05-05 | Applied Materials, Inc. | Apparatus and method for voltage contrast analysis of a wafer using a tilted pre-charging beam |
| US8461526B2 (en) | 2010-12-01 | 2013-06-11 | Kla-Tencor Corporation | Electron beam column and methods of using same |
| US8362425B2 (en) | 2011-03-23 | 2013-01-29 | Kla-Tencor Corporation | Multiple-beam system for high-speed electron-beam inspection |
| US8664594B1 (en) | 2011-04-18 | 2014-03-04 | Kla-Tencor Corporation | Electron-optical system for high-speed and high-sensitivity inspections |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2803770A (en) * | 1950-09-18 | 1957-08-20 | Fernseh Gmbh | Electron discharge tube apparatus |
| BE620211A (en) * | 1961-08-23 | |||
| US3158774A (en) * | 1962-06-08 | 1964-11-24 | Joel F Fleming | Image orthicon focusing coil and field flaring ring |
| GB1044090A (en) * | 1963-12-06 | 1966-09-28 | Tokyo Shibaura Electric Co | Television pickup tubes and methods of operating the same |
| US3471741A (en) * | 1967-04-07 | 1969-10-07 | Rca Corp | Television camera including an image isocon tube |
| GB1188417A (en) * | 1968-04-03 | 1970-04-15 | John Robert Garrood | Electron Beam Apparatus |
| US3714422A (en) * | 1970-04-06 | 1973-01-30 | Hitachi Ltd | Scanning stereoscopic electron microscope |
| US3801784A (en) * | 1972-04-14 | 1974-04-02 | Research Corp | Scanning electron microscope operating in area scan and angle scan modes |
-
1973
- 1973-12-28 US US429410A patent/US3930181A/en not_active Expired - Lifetime
-
1974
- 1974-10-15 DE DE19742449000 patent/DE2449000A1/en active Pending
- 1974-11-07 CA CA213,224A patent/CA1024667A/en not_active Expired
- 1974-11-26 FR FR7441919A patent/FR2256526A1/fr not_active Withdrawn
- 1974-11-29 IT IT29998/74A patent/IT1026651B/en active
- 1974-12-03 JP JP49137809A patent/JPS5099464A/ja active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10406268B2 (en) | 2011-04-29 | 2019-09-10 | Medtronic, Inc. | Blood fluid removal system performance monitoring |
| US10506933B2 (en) | 2011-04-29 | 2019-12-17 | Medtronic, Inc. | Method and device to monitor patients with kidney disease |
| WO2013161684A1 (en) * | 2012-04-24 | 2013-10-31 | 株式会社日立ハイテクノロジーズ | Charged particle beam device |
| JP2013229104A (en) * | 2012-04-24 | 2013-11-07 | Hitachi High-Technologies Corp | Charged particle beam apparatus |
| US9312091B2 (en) | 2012-04-24 | 2016-04-12 | Hitachi High-Technologies Corporation | Charged particle beam apparatus |
| US10532141B2 (en) | 2013-02-01 | 2020-01-14 | Medtronic, Inc. | Systems and methods for multifunctional volumetric fluid control |
| US10543052B2 (en) | 2013-02-01 | 2020-01-28 | Medtronic, Inc. | Portable dialysis cabinet |
| US10561776B2 (en) | 2013-02-01 | 2020-02-18 | Medtronic, Inc. | Fluid circuit for delivery of renal replacement therapies |
| US10478545B2 (en) | 2013-11-26 | 2019-11-19 | Medtronic, Inc. | Parallel modules for in-line recharging of sorbents using alternate duty cycles |
| US10420872B2 (en) | 2014-12-10 | 2019-09-24 | Medtronic, Inc. | Degassing system for dialysis |
Also Published As
| Publication number | Publication date |
|---|---|
| CA1024667A (en) | 1978-01-17 |
| DE2449000A1 (en) | 1975-07-03 |
| US3930181A (en) | 1975-12-30 |
| IT1026651B (en) | 1978-10-20 |
| FR2256526A1 (en) | 1975-07-25 |