JPS5099088A - - Google Patents

Info

Publication number
JPS5099088A
JPS5099088A JP49004183A JP418374A JPS5099088A JP S5099088 A JPS5099088 A JP S5099088A JP 49004183 A JP49004183 A JP 49004183A JP 418374 A JP418374 A JP 418374A JP S5099088 A JPS5099088 A JP S5099088A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49004183A
Other versions
JPS5928984B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP744183A priority Critical patent/JPS5928984B2/ja
Publication of JPS5099088A publication Critical patent/JPS5099088A/ja
Publication of JPS5928984B2 publication Critical patent/JPS5928984B2/ja
Expired legal-status Critical Current

Links

JP744183A 1973-12-27 1973-12-27 半導体装置の製法 Expired JPS5928984B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP744183A JPS5928984B2 (ja) 1973-12-27 1973-12-27 半導体装置の製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP744183A JPS5928984B2 (ja) 1973-12-27 1973-12-27 半導体装置の製法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP57156978A Division JPS5866329A (ja) 1982-09-09 1982-09-09 半導体装置の製法

Publications (2)

Publication Number Publication Date
JPS5099088A true JPS5099088A (ja) 1975-08-06
JPS5928984B2 JPS5928984B2 (ja) 1984-07-17

Family

ID=11577575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP744183A Expired JPS5928984B2 (ja) 1973-12-27 1973-12-27 半導体装置の製法

Country Status (1)

Country Link
JP (1) JPS5928984B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5568639A (en) * 1978-11-17 1980-05-23 Chiyou Lsi Gijutsu Kenkyu Kumiai Treating method of semiconductor surface with heat
JPS5866329A (ja) * 1982-09-09 1983-04-20 Sony Corp 半導体装置の製法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5568639A (en) * 1978-11-17 1980-05-23 Chiyou Lsi Gijutsu Kenkyu Kumiai Treating method of semiconductor surface with heat
JPS5866329A (ja) * 1982-09-09 1983-04-20 Sony Corp 半導体装置の製法

Also Published As

Publication number Publication date
JPS5928984B2 (ja) 1984-07-17

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