JPS5098786A - - Google Patents

Info

Publication number
JPS5098786A
JPS5098786A JP14430373A JP14430373A JPS5098786A JP S5098786 A JPS5098786 A JP S5098786A JP 14430373 A JP14430373 A JP 14430373A JP 14430373 A JP14430373 A JP 14430373A JP S5098786 A JPS5098786 A JP S5098786A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14430373A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14430373A priority Critical patent/JPS5098786A/ja
Publication of JPS5098786A publication Critical patent/JPS5098786A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)
JP14430373A 1973-12-27 1973-12-27 Pending JPS5098786A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14430373A JPS5098786A (ja) 1973-12-27 1973-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14430373A JPS5098786A (ja) 1973-12-27 1973-12-27

Publications (1)

Publication Number Publication Date
JPS5098786A true JPS5098786A (ja) 1975-08-06

Family

ID=15358924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14430373A Pending JPS5098786A (ja) 1973-12-27 1973-12-27

Country Status (1)

Country Link
JP (1) JPS5098786A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5421269A (en) * 1977-07-19 1979-02-17 Mitsubishi Electric Corp Manufacture for semiconductor mask
JPS56130925A (en) * 1980-03-17 1981-10-14 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS59130426A (ja) * 1983-01-17 1984-07-27 Toshiba Corp 半導体装置の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5421269A (en) * 1977-07-19 1979-02-17 Mitsubishi Electric Corp Manufacture for semiconductor mask
JPS56130925A (en) * 1980-03-17 1981-10-14 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS59130426A (ja) * 1983-01-17 1984-07-27 Toshiba Corp 半導体装置の製造方法

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