JPS5098781A - - Google Patents
Info
- Publication number
- JPS5098781A JPS5098781A JP14443473A JP14443473A JPS5098781A JP S5098781 A JPS5098781 A JP S5098781A JP 14443473 A JP14443473 A JP 14443473A JP 14443473 A JP14443473 A JP 14443473A JP S5098781 A JPS5098781 A JP S5098781A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14443473A JPS5324272B2 (ja) | 1973-12-27 | 1973-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14443473A JPS5324272B2 (ja) | 1973-12-27 | 1973-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5098781A true JPS5098781A (ja) | 1975-08-06 |
| JPS5324272B2 JPS5324272B2 (ja) | 1978-07-19 |
Family
ID=15362099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14443473A Expired JPS5324272B2 (ja) | 1973-12-27 | 1973-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5324272B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6193614A (ja) * | 1984-10-15 | 1986-05-12 | Nec Corp | 半導体単結晶基板 |
-
1973
- 1973-12-27 JP JP14443473A patent/JPS5324272B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6193614A (ja) * | 1984-10-15 | 1986-05-12 | Nec Corp | 半導体単結晶基板 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5324272B2 (ja) | 1978-07-19 |