JPS5097403A - - Google Patents
Info
- Publication number
- JPS5097403A JPS5097403A JP49001822A JP182274A JPS5097403A JP S5097403 A JPS5097403 A JP S5097403A JP 49001822 A JP49001822 A JP 49001822A JP 182274 A JP182274 A JP 182274A JP S5097403 A JPS5097403 A JP S5097403A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49001822A JPS5097403A (en) | 1973-12-28 | 1973-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49001822A JPS5097403A (en) | 1973-12-28 | 1973-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5097403A true JPS5097403A (en) | 1975-08-02 |
Family
ID=11512243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49001822A Pending JPS5097403A (en) | 1973-12-28 | 1973-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5097403A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60147740A (en) * | 1983-12-30 | 1985-08-03 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Exposure apparatus for forming round exposure pattern |
| JPH02254456A (en) * | 1989-03-29 | 1990-10-15 | Orc Mfg Co Ltd | Photoresist exposure method and its device |
-
1973
- 1973-12-28 JP JP49001822A patent/JPS5097403A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60147740A (en) * | 1983-12-30 | 1985-08-03 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Exposure apparatus for forming round exposure pattern |
| JPH0552490B2 (en) * | 1983-12-30 | 1993-08-05 | Ibm | |
| JPH02254456A (en) * | 1989-03-29 | 1990-10-15 | Orc Mfg Co Ltd | Photoresist exposure method and its device |