JPS5096183A - - Google Patents
Info
- Publication number
- JPS5096183A JPS5096183A JP14354773A JP14354773A JPS5096183A JP S5096183 A JPS5096183 A JP S5096183A JP 14354773 A JP14354773 A JP 14354773A JP 14354773 A JP14354773 A JP 14354773A JP S5096183 A JPS5096183 A JP S5096183A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14354773A JPS5096183A (ja) | 1973-12-24 | 1973-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14354773A JPS5096183A (ja) | 1973-12-24 | 1973-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5096183A true JPS5096183A (ja) | 1975-07-31 |
Family
ID=15341272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14354773A Pending JPS5096183A (ja) | 1973-12-24 | 1973-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5096183A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60168133A (ja) * | 1984-02-13 | 1985-08-31 | Canon Inc | 照明光学装置 |
| JPH09102456A (ja) * | 1996-05-24 | 1997-04-15 | Canon Inc | 照明光学装置 |
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1973
- 1973-12-24 JP JP14354773A patent/JPS5096183A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60168133A (ja) * | 1984-02-13 | 1985-08-31 | Canon Inc | 照明光学装置 |
| JPH09102456A (ja) * | 1996-05-24 | 1997-04-15 | Canon Inc | 照明光学装置 |