JPS5093881A - - Google Patents
Info
- Publication number
- JPS5093881A JPS5093881A JP399074A JP399074A JPS5093881A JP S5093881 A JPS5093881 A JP S5093881A JP 399074 A JP399074 A JP 399074A JP 399074 A JP399074 A JP 399074A JP S5093881 A JPS5093881 A JP S5093881A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP399074A JPS5093881A (ja) | 1973-12-25 | 1973-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP399074A JPS5093881A (ja) | 1973-12-25 | 1973-12-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5093881A true JPS5093881A (ja) | 1975-07-26 |
Family
ID=11572444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP399074A Pending JPS5093881A (ja) | 1973-12-25 | 1973-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5093881A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63307255A (ja) * | 1987-06-08 | 1988-12-14 | Oki Electric Ind Co Ltd | 有機機能性材料薄膜の製造方法及びその製造装置 |
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1973
- 1973-12-25 JP JP399074A patent/JPS5093881A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63307255A (ja) * | 1987-06-08 | 1988-12-14 | Oki Electric Ind Co Ltd | 有機機能性材料薄膜の製造方法及びその製造装置 |